Imprint mold, production method thereof, imprint device, and imprint method
A manufacturing method and a technology of molds, which are applied to home appliances, other home appliances, semiconductor/solid-state device manufacturing, etc., can solve the problems of time-consuming and difficult to achieve large-scale, and achieve the effect of excellent productivity
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no. 1 Embodiment approach
[0114] image 3 It is a schematic diagram showing the first embodiment of the imprint apparatus of the present invention.
[0115] The imprinting apparatus is roughly configured to include: a coating member 22 for coating a photocurable composition on the surface of a belt-shaped substrate 20 moving along each roller; an endless belt-shaped imprint mold 10 for It is erected on the large roller 24 and the small roller 26; the light irradiation part 28 is used to make the photocurable composition coated on the surface of the substrate 20 and the mold 10 for imprinting in the lower half of the large roller 24 In the state where the surface of the photocurable composition is in contact, light is irradiated to the photocurable composition; the under-mold roll 30 is arranged opposite to the coating member 22 with the substrate 20 interposed; the nip roll 32 is used to apply the photocurable composition The substrate 20 of the curable composition is pressed onto the imprint mold 10 ...
no. 2 Embodiment approach
[0122] Figure 4 It is a schematic diagram showing a second embodiment of the imprint apparatus of the present invention. The same reference numerals are assigned to the same configurations as those of the first embodiment, and description thereof will be omitted.
[0123] The imprinting apparatus is roughly configured to have: a coating member 22 for applying a photocurable composition to the surface of a belt-shaped substrate 20 moving along each roller; and an endless belt-shaped imprinting mold 10 on which On the upstream side roll 36, the downstream side roll 38, and the cooling roll 40; the light irradiation roll 42, which is arranged between the upstream side roll 36 and the downstream side roll 38, is used to make the photocurable composition coated The substrate 20 is moved along its surface, and in the state where the photocurable composition coated on the surface of the substrate 20 is pressed onto the imprint mold 10, light is irradiated to the photocurable compos...
no. 3 Embodiment approach
[0129] Figure 5 It is a schematic diagram showing a third embodiment of the imprint apparatus of the present invention. The same reference numerals are assigned to the same configurations as those of the first embodiment, and description thereof will be omitted.
[0130] The imprinting device is roughly configured to include: an endless belt-shaped imprinting mold 10 , which is mounted on three rollers, namely, an upper roller 46 , an upstream lower roller 48 , and a downstream lower roller 50 , which are arranged at vertices of a substantially equilateral triangle; The application part 22, which is arranged opposite to the upper roller 46 across the imprint mold 10, is used to apply the photocurable composition to the surface of the imprint mold 10; The photocurable composition on the surface of the imprint mold 10 is in contact with the substrate 20 moving along each roller between the upstream bottom roller 48 and the downstream bottom roller 50, and the photocurable comp...
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Abstract
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