Preparation method of zinc oxide-based tubular rotary target material
A rotating target and base tubular technology is applied in the field of preparation of zinc oxide-based tubular rotating target materials, which can solve the problems of easy generation of abnormal discharge, reduced efficiency, deterioration of coating quality, etc., so as to avoid density reduction, eliminate internal stress, reduce The effect of volume shrinkage
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[0018] The preparation method of the present invention is completed according to the following steps:
[0019] 1. Preparation of zinc salt solution: Weigh quantitative metal zinc (≥4N) and dissolve it completely with superior pure 1+1 nitric acid and dilute it with deionized water to [Zn 2+ ] concentration is 1.5-2.0mol / L;
[0020] 2. Preparation of aluminum salt solution: according to the ratio of Zn: Al=93-99: 1-7 (at%, atomic ratio), weigh Al(NO 3 ) 3 9H 2 O (excellent grade), completely dissolved in absolute ethanol. If preparing pure zinc oxide powder, this step is omitted;
[0021] 3. Precipitant solution preparation: weigh quantitative NH 4 HCO 3 (excellent pure), completely dissolved in deionized water, and prepared into a 25% (wt / v%) solution;
[0022] 4. Transfer the zinc salt solution and aluminum salt solution into the reaction kettle, stir for 20 minutes, and adjust the temperature of the reaction solution to 30-45°C.
[0023] 5. At a stirring speed of 300...
Embodiment 1
[0030] Weighing: Metal zinc 9830g (≥4N) is completely dissolved with superior grade pure 1+1 (v / v%) nitric acid, and diluted with deionized water to [Zn 2+ ] Concentration is 1.2mol / L, is mixed with zinc salt solution; Weigh Al(NO 3 ) 3 9H 2 O (excellent grade pure) 2347g, add 10L absolute ethanol to dissolve completely, be mixed with aluminum salt solution; Precipitant solution: weigh NH 4 HCO 3 (Excellent grade pure) 40000g, prepared into 25% (wt / v%) solution with deionized water.
[0031] The zinc salt solution and the aluminum salt solution were transferred into the reaction kettle, stirred for 20 minutes, and the temperature of the reaction solution was adjusted to 35°C. At a stirring speed of 400 rpm, add the precipitant solution into the mixed solution of zinc salt and aluminum salt at a rate of 10 L / min, adjust the reaction pH value to 7.0-7.8, and react for 60 minutes to obtain a reaction product. Transfer the reaction product to a ceramic membrane washing filter...
Embodiment 2
[0035] Weighing: Metal zinc 10000g (≥4N) is completely dissolved with superior grade pure 1+1 (v / v%) nitric acid, and diluted with deionized water to [Zn 2+ ] Concentration is 1.2mol / L, is prepared into zinc salt solution; precipitant solution: weigh NH 4HCO 3 (Excellent grade pure) 40000g, prepared into 25% (wt / v%) solution with deionized water.
[0036] The zinc salt solution and the aluminum salt solution were transferred into the reaction kettle, stirred for 20 minutes, and the temperature of the reaction solution was adjusted to 40°C. At a stirring speed of 400 rpm, add the precipitant solution into the mixed solution of zinc salt and aluminum salt at a speed of 5 L / min, adjust the reaction pH value to 6.5-7.0, and react for 60 minutes to obtain a reaction product. Transfer the reaction product to a ceramic membrane washing filter, and wash it repeatedly with deionized water until the conductivity of the washing supernatant is ≤20 μs, then stop washing. The obtained pr...
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