Orientation material table for processing crystal inclination angle
A crystal and angle technology, applied in stone processing equipment, work accessories, manufacturing tools, etc., can solve problems such as lack of crystal orientation accuracy and difficulty in achieving crystal orientation accuracy
Active Publication Date: 2012-08-01
BEIJING CENTURY GOLDRAY SEMICON CO LTD
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AI Technical Summary
Problems solved by technology
The current technology generally can only achieve the required crystal orientation, but cannot meet the required crystal orientation accuracy, that is, it is difficult to meet the requirements for crystal orientation accuracy.
Method used
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Embodiment 1
[0028] To make a silicon carbide crystal such as (0001) with a crystal orientation of 4° off the X axis to make (0001), you only need to fix the silicon carbide crystal on this orientation table, and then carry out diffraction orientation. The X-axis is the horizontal plane, just adjust the horizontal rotation target 1 in the horizontal direction, and adjust 4° in the opposite direction according to the value displayed on the scale to find the crystal orientation we require.
Embodiment 2
[0030] For example, if the silicon carbide crystal is made into (0001) with a crystal orientation of (0001) offset by 4° from the Y axis, it is only necessary to fix the silicon carbide crystal on this orientation table, and then carry out diffraction orientation. The Y-axis is a vertical plane, only need to adjust the vertical rotation target 15 in the vertical direction, and adjust 4° in the opposite direction according to the value displayed on the scale to find the crystal orientation we require.
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Abstract
The invention provides an orientation material table for processing a crystal inclination angle. The orientation material table comprises a base, an adjustment plate, a vertical rotary target, a horizontal rotary target and a fixing turntable screw, wherein a bracket and a backstop plate are arranged on the upper part of the base; the adjustment plate is arranged on the backstop plate; a rotary table is arranged on a vertical plate in the middle of the adjustment plate; the rotary table is connected with a connection frame, and the connection frame is opposite to a clamping piece arranged at the end away from the bracket; and one side of the rotary table is provided with the fixing turntable screw for fixing a dial, while the other side of the rotary table is provided with the vertical rotary target in the vertical direction. The invention aims to better, quicker and more directly find out a required crystal orientation, and the precision of the crystal orientation is controlled to a smallest extent, so that material waste processing repeated due to low precision is avoided, the cost is greatly reduced, and the utilization rate of crystals is improved.
Description
technical field [0001] The invention relates to an orientation material platform for crystal off-angle processing, which belongs to the field of crystal processing devices. Background technique [0002] The crystal growth plane is often not the crystal plane we require to process. To achieve the ideal crystal plane we want, it must be solved by orientation. The current technology generally can only find the required crystal orientation, but cannot meet the required precision of the crystal orientation, that is, it is difficult to meet the requirements of the crystal orientation precision. Contents of the invention [0003] The technical problem to be solved by the present invention is to overcome the existing defects and provide an orientation table for crystal off-angle processing, which can control the precision of crystal orientation more conveniently. [0004] In order to solve the problems of the technologies described above, the present invention provides the follow...
Claims
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Inventor 李闯吴星倪代秦李旭明贾海涛高鹏成张世杰
Owner BEIJING CENTURY GOLDRAY SEMICON CO LTD