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Conductive sensitive film three-layer structure

A three-layer structure and sensitive film technology, applied in the direction of material electrochemical variables, etc., can solve the problems of response baseline drift, small sensor response value, etc.

Inactive Publication Date: 2012-08-01
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The problem to be solved by the present invention is: how to improve the problem of the baseline drift of the non-conductive sensitive film gas sensor mixed with conductive particles and the problem of the small response value of the sensor

Method used

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  • Conductive sensitive film three-layer structure
  • Conductive sensitive film three-layer structure
  • Conductive sensitive film three-layer structure

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Embodiment

[0026] like figure 1 It shows that the golden fork finger electrode sensing function structure with a width and spacing of 40mm width and spacing is used on the silicon base plate. After that, the air spray technology is used to alternate the PEO sensitive film and multi -wall carbon nano -tube film on the surface of the substrate.After the residual solvents inside the sensitive membrane are volatilized, they will obtain a three -layer PEO and carbon nanotomay conductors.The sensor has a minimum detection limit of toluene steam reaching 0.2ppm and has a good baseline.

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Abstract

The invention discloses a conductive sensitive film three-layer structure, and belongs to the technical field of sensing. The conductive sensitive film three-layer structure comprises a substrate and an interdigital electrode sensing functional structure arranged on the substrate, and is characterized by also comprising a sensitive film three-layer structure which is arranged on and parallel to the interdigital electrode sensing functional structure, wherein the three-layer structure sequentially comprises a first non-conductive sensitive material layer, a conductive particle layer and a second non-conductive sensitive material layer from top to bottom. The conductive sensitive film three-layer structure is mainly used for a conductive sensor.

Description

Technical field [0001] The invention involves the field of conductivity sensing technology, which specifically involves a sensitive film structure for detection. Background technique [0002] Director -type sensing technology is currently widely used and has a good future prospect.As a gas sensor, the resistance of the sensitive membrane will change with the concentration of the measured substance. Therefore, theoretically, as long as the resistance changes are detected, the concentration information of the measured material can be obtained.The detection mechanism of the electrocondylum sensitive membrane is divided into the following two types: 1. Semiconductor or sensitive membrane adsorption, absorbing oxidation or restoring substances of semiconductor or similar materials.The conductivity rate, the measured material is left to leave the sensitive film during the analysis, the cave or electron that was injected before leaving, and the conductive rate returned to the initial va...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/30
Inventor 谢光忠蒋亚东杜晓松太惠玲周泳朱涛廖剑
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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