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Monolithic tri-axis amr sensor and manufacturing method thereof

A technology for AMR sensors and sensors, which is applied in the manufacture of measuring instruments, instruments, three-component magnetometers, etc., can solve the problems that AMR sensors cannot realize three-axis integration, and achieve the effects of low cost, improved reliability, and strong reliability

Active Publication Date: 2015-04-15
MEMSIC SEMICON WUXI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] The technical problem to be solved by the present invention is that the existing AMR sensor cannot realize the defect of three-axis integration; the present invention aims to provide a single-chip three-axis AMR sensor with high reliability and low cost

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  • Monolithic tri-axis amr sensor and manufacturing method thereof
  • Monolithic tri-axis amr sensor and manufacturing method thereof
  • Monolithic tri-axis amr sensor and manufacturing method thereof

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Embodiment Construction

[0028] The specific embodiments of the present invention will be described in detail below with reference to the drawings.

[0029] See figure 1 As shown, one embodiment of the present invention discloses a single-chip three-axis AMR sensor, which includes a substrate (not shown), a first horizontal sensor (not shown) and a second horizontal sensor (not shown) arranged on the substrate. (Not shown), a third horizontal sensor and a flux concentrator 40 arranged on the third horizontal sensor, wherein an insulating layer 50 is provided between the first, second and third horizontal sensors and the flux concentrator 40 (See figure 2 ). The first, second, and third horizontal sensors respectively include at least two sets of sensors. In this embodiment, the third horizontal sensor includes two groups of sensors, that is, the first sensor group 10 and the second sensor group 11, and the first sensor group 10 and the second sensor group 11 have the same structure. The first sensor g...

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Abstract

A monolithic tri-axis anisotropic magnetoresistive (AMR) sensor and the method of manufacturing of the AMR sensor are presented. In one embodiment, the monolithic tri-axis AMR sensor includes (a) a substrate, (b) a first horizontal direction sensor disposed on the substrate, (c) a second horizontal direction sensor disposed on the substrate, (d) a third horizontal direction sensor disposed on the substrate, and (e) a flux concentrator disposed on the third horizontal direction sensor, wherein the flux concentrator is in cooperation with the third horizontal direction sensor to realize a function of a Z-axis sensor, such that the Z-axis direction can be effectively measured. The integration of the tri-axis AMR sensor is therefore accomplished. In addition, the integrated tri-axis AMR sensor has low production cost and improved reliability.

Description

Technical field [0001] The invention relates to a single-chip three-axis sensor and a manufacturing method thereof, in particular, a single-chip three-axis AMR sensor and a manufacturing method thereof. Background technique [0002] With the development of sensor technology, it is increasingly used in various applications. Moreover, it has also developed more and more types. For example, one of them is a magnetic field sensor based on anisotropic magnetoresistance (AMR) (hereinafter referred to as AMR sensor). [0003] As shown in US Patent No. 5,247,278, it discloses an AMR sensor. Such AMR sensors for low-cost consumer applications are usually manufactured on silicon or other substrates through semiconductor manufacturing technology. The key is the magnetic material whose resistance value changes with the change of the external magnetic field. [0004] Using reliable semiconductor deposition technology, the magnetic thin film can be uniformly deposited on the substrate. In ord...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R33/09G01R3/00
CPCG01R33/096G01R33/0206
Inventor 蔡永耀卞锺元赵阳蒋乐跃
Owner MEMSIC SEMICON WUXI