Four-degree-of-freedom micromechanical gyroscope

A micromachined gyroscope and degree-of-freedom technology, which is applied in the direction of gyroscopic effect for speed measurement, gyroscope/steering sensing device, speed/acceleration/shock measurement, etc. noise, etc.

Inactive Publication Date: 2012-08-22
HARBIN ENG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Using closed-loop driving to control the stable vibration of the driving mode will increase the complexity of the circuit, and will also introduce more electronic noise, which will interfere with the acquisition and processing of signals.

Method used

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  • Four-degree-of-freedom micromechanical gyroscope
  • Four-degree-of-freedom micromechanical gyroscope
  • Four-degree-of-freedom micromechanical gyroscope

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Embodiment Construction

[0019] The present invention is described in more detail below in conjunction with accompanying drawing example:

[0020] combine figure 1 The structure of the present invention is mainly composed of driving mass 2, driving static comb 1 and moving comb 16, decoupling frame 3, detection mass 4, sensitive mass 5, sensitive static comb 6 and moving comb 17. Drive the static comb 1 and the moving comb 16 to form a capacitive comb drive unit, which is arranged on the drive mass 2, the drive mass 2 and the four anchor points 7 are connected by two I-shaped beams 10, and the drive mass 2 and the decoupling frame 3 are connected through four folded beams 11, and the decoupling frame 3 and the four anchor points 8 are connected through two I-beams 12 to form a driving mode; the proof mass 4 and the decoupling frame 3 are connected through four Four folded beams 13 are connected, and the sensitive mass 5 is connected through four folded beams 14, the sensitive mass 5 is connected with...

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Abstract

The invention provides a four-degree-of-freedom micromechanical gyroscope. Both a driving model and a sensitive model are of complete 2-DOF (degree-of-freedom) vibration structures, wherein the driving model comprises a static driving comb tooth, a movable driving comb tooth, a driving mass block and a decoupling frame, and the sensitive model comprises a sensitive static comb tooth, a sensitive movable comb tooth, a detection mass block and a sensitive mass block. Vibration of the driving mass block in a driving direction x is limited by means of connecting two I-beams with four anchor points, and vibration of the decoupling frame in the driving direction x is limited by means of connecting two I-beams with four anchor points. The detection mass block is connected with the decoupling frame through four folding beams, the driving model is connected with the sensitive model, and movement of the sensitive mass block in a sensitive direction y is limited by means of connecting two I-beams with four anchor points. By the aid of the complete 2-DOF vibration structures with high 3dB bandwidths, 3dB bandwidths of the driving model and the sensitive model are simultaneously increased, so that a high system bandwidth is obtained, and the stability and the interference resistance of the gyroscope are improved.

Description

technical field [0001] The invention relates to a multi-degree-of-freedom micro-mechanical gyroscope. Background technique [0002] The research on the micromechanical gyroscope began in the late 1980s, and it is a new type of micro-miniature inertial navigation component. Compared with traditional mechanical gyroscopes and optical gyroscopes, its advantages are small size, light weight, low power consumption, long life, low cost, easy integration, high reliability, and mass production. It is the core of the future inertial navigation technology field. One of the components. The current micromechanical gyroscopes are mainly divided into two categories: single-degree-of-freedom and multi-degree-of-freedom: the single-degree-of-freedom micromechanical gyroscope adopts a 1-DOF driving structure and a 1-DOF sensitive structure. Frequency matching is used to realize the resonance of the driving mode and the sensitive mode at the same time, thereby improving the sensitivity of t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/567
Inventor 王伟吕晓永李欣杨博范岳李强王咸鹏宋鸿儒刘晓隆朱玮
Owner HARBIN ENG UNIV
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