Four-degree-of-freedom micromechanical gyroscope

Abstract

The invention provides a four-degree-of-freedom micromechanical gyroscope. Both a driving model and a sensitive model are of complete 2-DOF (degree-of-freedom) vibration structures, wherein the driving model comprises a static driving comb tooth, a movable driving comb tooth, a driving mass block and a decoupling frame, and the sensitive model comprises a sensitive static comb tooth, a sensitive movable comb tooth, a detection mass block and a sensitive mass block. Vibration of the driving mass block in a driving direction x is limited by means of connecting two I-beams with four anchor points, and vibration of the decoupling frame in the driving direction x is limited by means of connecting two I-beams with four anchor points. The detection mass block is connected with the decoupling frame through four folding beams, the driving model is connected with the sensitive model, and movement of the sensitive mass block in a sensitive direction y is limited by means of connecting two I-beams with four anchor points. By the aid of the complete 2-DOF vibration structures with high 3dB bandwidths, 3dB bandwidths of the driving model and the sensitive model are simultaneously increased, so that a high system bandwidth is obtained, and the stability and the interference resistance of the gyroscope are improved.

Description

technical field [0001] The invention relates to a multi-degree-of-freedom micro-mechanical gyroscope. Background technique [0002] The research on the micromechanical gyroscope began in the late 1980s, and it is a new type of micro-miniature inertial navigation component. Compared with traditional mechanical gyroscopes and optical gyroscopes, its advantages are small size, light weight, low power consumption, long life, low cost, easy integration, high reliability, and mass production. It is the core of the future inertial navigation technology field. One of the components. The current micromechanical gyroscopes are mainly divided into two categories: single-degree-of-freedom and multi-degree-of-freedom: the single-degree-of-freedom micromechanical gyroscope adopts a 1-DOF driving structure and a 1-DOF sensitive structure. Frequency matching is used to realize the resonance of the driving mode and the sensitive mode at the same time, thereby improving the sensitivity of t...

AI Technical Summary

Problems solved by technology

Using closed-loop driving to control the stable vibration of the driving mode will increase the complexity of the circuit, and will also introduce more electronic noise, which will interfere with the acquisition and processing of signals.

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