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System and method for improving laser collimation precision by utilizing optical phase conjugation principle

A technology of optical phase conjugation and laser alignment, applied in the field of laser measurement, can solve the problems of inconvenient industrial application, high cost, complex system, etc., and achieve the effect of easy control, small size and simple system structure

Inactive Publication Date: 2012-09-26
TSINGHUA UNIV
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Problems solved by technology

However, these methods are costly, complex systems, and inconvenient for industrial applications

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  • System and method for improving laser collimation precision by utilizing optical phase conjugation principle
  • System and method for improving laser collimation precision by utilizing optical phase conjugation principle
  • System and method for improving laser collimation precision by utilizing optical phase conjugation principle

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Embodiment Construction

[0014] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.

[0015] Such as figure 1 As shown, the system of the present invention includes:

[0016] Laser 1, polarizer 2, beam expander collimation system 3, first beam splitter 4, first polarizing beam splitter 5, measured object 6, reflector 7, second polarizing beam splitter 8, Faraday rotator 9, A second beam splitter 10 , a spatial optical phase modulator 11 , a wavefront detector 12 , a computer 13 and a position detector 14 .

[0017] Wherein, the polarizer 2, the beam expander collimation system 3, the first beam splitter 4, the first polarizing beam splitter 5 and the reflector 7 are arranged sequentially along the emission beam of the laser 1, and the polarizing direction of the polarizer 2 should be set as It is ensured that the linearly polarized light after passing through the polarizer 2 can completely pass through the first polarizing be...

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Abstract

The invention provides a system for improving the laser collimation precision by utilizing an optical phase conjugation principle, comprising a laser device, wherein a polarizer, a beam expanding and collimation system, a first beam splitter, a first polarization spectroscope and a reflector are sequentially arranged along an emitting light beam of the laser device; a position detector is arranged in a beam splitting direction of the first beam splitter; reflection light of the reflector is parallel to the emitting light beam of the laser device; a second polarization spectroscope, a Faraday rotator, a second beam splitter and a space optical phase modulating device are sequentially arranged on the reflection light of the reflector; a wave-front detector is arranged in the beam splitting direction of the second beam splitter; and the space optical phase modulating device and the wave-front detector are connected to a computer. The invention further provides a method for improving the laser collimation precision by utilizing the system; the system disclosed by the invention has a simple structure and influences of uneven atmosphere on the laser collimation can be effectively compensated; and the space optical phase modulating device is used as a phase conjugation mirror so that the system has the advantages of small size, easiness for controlling and the like.

Description

technical field [0001] The invention belongs to the field of laser measurement, and relates to a system and method for improving laser collimation precision by using the principle of optical phase conjugation. Background technique [0002] Collimation technology is the basis for the measurement of various geometric parameters. With the development of science and technology, modern manufacturing has higher and higher requirements for alignment technology. Due to the good directionality of the laser, it is widely used as a collimated light source to measure geometric quantities such as straightness, flatness, and flatness. However, when the laser beam is used as a straight line reference, there is still external interference. When the laser beam exits from the laser head and reaches the detector, the instability of the external environment causes the uneven distribution of the atmosphere, causing the laser wavefront to be distorted, and the light inevitably drifts during the...

Claims

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Application Information

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IPC IPC(8): G02B27/30G02B27/28G01B11/00
Inventor 黄沛黄有为李岩李达成
Owner TSINGHUA UNIV
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