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Barometric distribution measuring device based on light interference

A measuring device and optical interference technology, which is applied in the direction of fluid pressure measurement using optical methods, can solve the problems of low measurement accuracy and inability to measure gas film pressure, etc., and achieve the effect of high measurement accuracy

Active Publication Date: 2014-03-12
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] It can be seen that the existing technology cannot measure the air pressure when the gas pressure inside the gas film changes dynamically, nor can it measure the air pressure of the gas film below the millimeter level, and the measurement accuracy is low

Method used

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  • Barometric distribution measuring device based on light interference
  • Barometric distribution measuring device based on light interference
  • Barometric distribution measuring device based on light interference

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0041] see figure 1 , the air pressure distribution measurement device based on optical interference of the present invention includes a light source 1, an interference microscope 2, a first photoelectric sensor 3, a spectroscopic converter 4, a data collector 5, a computer 6, a transparent glass plate 7, a reflection platform 8, and a system Support 9; wherein, the transparent glass plate 7 and the reflective platform 8 form an air chamber with adjustable spacing to fill the measured air film; the system support 9 includes a height-adjustable first support 91 and a second support 92, the first support 91 and the second bracket 92 are installed above the transparent glass plate 7; the light source 1, the interference microscope 2, the first photoelectric sensor 3, and the spectroscopic converter 4 are all installed between the first bracket 91 and the second bracket 92;

[0042] The light source 1 is used to send the generated original composite light containing two or more mo...

Embodiment 2

[0056] see figure 2 , this embodiment also includes a first beam splitter 10, an interferometric camera 11, and an interferometric camera 12 based on the structure of the first embodiment; wherein,

[0057] The first beam splitter 10 is arranged between the interference microscope 2 and the spectroscopic converter 4, and is used to divide the amplified reflected light returned by the transparent glass plate 7 into two beams in proportion: one beam of amplified reflected light is sent to the interferometric camera 11 , another beam of amplified reflected light is sent to the splitting converter 4 .

[0058] Here, the beam splitting ratio of the first beam splitter 10 is determined by the first beam splitter 10 itself, and may be 5:5, 4:6 and so on. In practical applications, a beam splitter with a corresponding ratio can be selected according to the required beam splitting ratio.

[0059] The interferometric camera 11 is configured to send the captured beam of amplified refl...

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Abstract

The invention provides a barometric distribution measuring device based on light interference, comprising a light source, an interference microscope, a first photoelectric sensor, a spectral converter, a data collector, a computer, a transparent glass board, a reflection platform and a system bracket, wherein the transparent glass board and the reflection platform form a gas cavity used for filling measured gas and having an adjustable distance; the system bracket comprises a first bracket and a second bracket, which have adjustable heights, and the first bracket and the second bracket are installed above the transparent glass board; and the light source, the interference microscope, the first photoelectric sensor and the spectral converter are installed between the first bracket and the second bracket. The barometric distribution measuring device provided by the invention can measure a gas membrane with micron level thickness and the dynamitic barometric pressure change in the gas membrane with high measuring precision, so that the barometric distribution measuring device can be extensively applied in the field of barometric pressure detection.

Description

technical field [0001] The invention relates to air pressure measurement technology, in particular to an air pressure distribution measurement device based on light interference. Background technique [0002] A gas bearing is a fluid film lubricated bearing that uses gas as a lubricating medium. Between the shaft and the rigid layer or flexible layer inside the bearing seat, the gas as a lubricating medium forms an air film, and the internal air pressure of the air film makes the rotor float, avoiding direct contact between the shaft and the bearing seat. In the normal operation of the gas bearing, the gas film is wedge-shaped. Whether the gas film is an ideal wedge shape and the distribution of air pressure inside the gas film are the key factors of the gas bearing load range, operating state, output accuracy and other performance. Therefore, it is of great significance to measure the air pressure distribution inside the air film. [0003] At present, there are relativel...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L11/02
Inventor 侯予赵红利马斌陈双涛赖天伟刘昌海刘秀芳
Owner XI AN JIAOTONG UNIV