XY precision motion platform capable of suppressing vibration by utilizing piezoelectric ceramic

Abstract

The invention provides a XY precision motion platform capable of suppressing vibration by utilizing a piezoelectric ceramic. An X-axis linear motor component (2), a Y-axis linear motor component (3) and a motion connector component (4) are installed on a baseplate (5), X-axis mover piezoelectric ceramic films (15) are arranged on the upper surface and the lower surface of an X-axis linear motor mover (16) of the X-axis linear motor component (2) respectively, and Y-axis mover piezoelectric ceramic films (20) are arranged on the upper surface and the lower surface of a Y-axis linear motor mover (21) of the Y-axis linear motor component (3) respectively. The XY precision motion platform of the invention has a rapid response to mechanism vibration of a linear motor mover and can eliminate or reduce the mechanism vibration of the linear motor mover intelligently, so that the mechanism rigidity is improved. Moreover, the XY precision motion platform has advantages of light weight, small size, etc., and is suitable for high-speed packaging operations of semiconductor integrated chips carried out in a small space, such as a production line and the like.

Description

technical field [0001] The invention relates to semiconductor chip packaging equipment, in particular to an XY precision motion platform which responds quickly to the vibration of a linear motor mover and reduces it in an intelligent way compared with a traditional XY motion platform, and is suitable for production High-speed packaging of semiconductor integrated chips in narrow spaces such as assembly lines. Background technique [0002] In the XY motion platform, the weakest and most prone to mechanism vibration is the mover coil assembly of the linear motor. This is because: [0003] 1. The mover coil assembly of the linear motor generally protrudes from the linear motor housing in the form of a cantilever beam, and the kinematic connection mechanism generally adopts two sets of roller guide rails with a cantilever beam for sliding connection. This structure itself is prone to vibration vibration, resulting in low system stiffness; [0004] 2. The driving current passe...

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Problems solved by technology

[0003] 1. The mover coil assembly of the linear motor generally protrudes from the linear motor housing in the form of a cantilever beam, and the kinematic connection mechanism generally adopts two sets of roller guide rails with a cantilever beam for sliding connection. This structure itself is prone to vibration vibration, resulting in low system stiffness;

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