Method and device for dispatching to batch machine

A batch processing and machine technology, which is applied in the manufacture of electrical components, semiconductor/solid-state devices, circuits, etc., can solve the problems of increasing semiconductor manufacturing costs, reducing production efficiency, and being unable to determine the delivery of chipsets, etc., to reduce waiting time , to ensure the effect of correctness and flexibility

Active Publication Date: 2015-01-28
SEMICON MFG INT (SHANGHAI) CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In view of this, the technical problem that the present invention solves is: rely on experience to arrange the mode of chip group processing order, the engineer can't determine the shipment of the chip group that can batch process, cause machine platform to be because of lacking the chip group to be processed that can be batch-processed. Unable to perform batch processing, reducing production efficiency and increasing the cost of semiconductor manufacturing

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  • Method and device for dispatching to batch machine
  • Method and device for dispatching to batch machine

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specific Embodiment 1

[0032] The following is a detailed description figure 1 The delivery method of the batch processing machine proposed by the present invention is shown.

[0033] For some machines that perform specific processes, such as furnace tube area, etching area and acid tank area, because of the long processing time for the process, it is often necessary to batch process the chipsets to be processed to the machine. . These machines that perform specific processes are called batch machines. This embodiment takes a Batch machine as an example for description.

[0034] Step 101: For different chipsets, after saving the process flow, the machine information for executing each process, the recipe parameters of each process, and the current process execution status, set the future flow (Step Cnt);

[0035] In this step, the process flow corresponding to different chipsets, the machine information that executes each process, the recipe parameters of each process, and the current process execution s...

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Abstract

The invention provides a method and a device for dispatching to a batch machine. The method includes: by comparing the formulation parameter of each chipset in a performing process of a batch machine with the formulation parameter of a to-be-processed chipset of the batch machine, preferentially processing current processes of the chipsets with the same formulation parameter, and dispatching to the batch machine to enable the batch machine to obtain the chipsets as quickly as possible, wherein the chipsets can be batched together with the to-be-processed chipset. Therefore, waiting time for dispatching is shortened, accuracy and flexibility of dispatching are guaranteed, the problem that the batch machine cannot batch due to lacking of dispatching of the chipsets for batching is solved, and production efficiency is improved while cost for manufacturing semiconductors is saved.

Description

Technical field [0001] The invention relates to a method and device for controlling semiconductor production processes, in particular to a method and device for dispatching goods to a batch processing machine. Background technique [0002] At present, in semiconductor manufacturing, wafers must go through a process flow consisting of hundreds of processes in order to make the final product. Different processes are carried out in different machines, and one or more machines that complete the same process form a machine. Taiwan group. After the wafer completes a current process, it will be dispatched to the machine performing the next process for processing according to the process flow. Different products are produced using different process flows. A batch of wafers produced using the same process flow is called a chip set (Lot). According to its specific process flow, each lot enters the machine that performs different processes for processing. For a machine, the lot whose curr...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/00
Inventor 吕庆麟陈波范安涛钱红兵赵晨
Owner SEMICON MFG INT (SHANGHAI) CORP
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