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Articles including a porous substrate having a conformal layer thereon

A conformal coating and product technology, applied in coating, transportation and packaging, textiles and papermaking, etc., can solve problems in the field of hindering products and hindering the field of porous materials

Inactive Publication Date: 2012-11-14
3M INNOVATIVE PROPERTIES CO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the ability of the process to coat these high aspect ratio surfaces is challenged by the time required for reactive gases to diffuse into these regions and be completely purged before adding the next precursor.
This diffusion problem has greatly hindered the extension of the technology to the field of porous materials, which in turn also hindered the extension of the technology to the field of articles with porous substrates coated with ALD.

Method used

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  • Articles including a porous substrate having a conformal layer thereon
  • Articles including a porous substrate having a conformal layer thereon
  • Articles including a porous substrate having a conformal layer thereon

Examples

Experimental program
Comparison scheme
Effect test

example

[0040] Objects and advantages of this invention are further illustrated by the following examples, but the particular materials and amounts thereof recited in these examples, as well as other conditions and details, should not be construed to unduly limit this invention.

[0041] How to test the surface energy of a sample

[0042] Several samples of porous substrates having conformal layers or coatings thereon are described below with reference to examples. When discussing the surface energy of a sample, the corresponding readings are obtained as follows: Various levels of dyne test solutions are obtained. Solutions with levels ranging from 30 to 70 dynes / cm according to ASTM standard D-2578 were purchased from Jemmco, LLC (Mequon, WI). Solutions with levels ranging from 72 to 86 dynes / cm were prepared by adding the amounts of MgCl shown in Table 1 2 ·6H 2 O was prepared by mixing enough deionized water to give a total of 25 g of solution.

[0043]

[0044] Using thes...

example 1

[0063] Each of the double-sided flanges of the reactor was used to support a disc cut from the porous polypropylene membrane discussed above with Substrate A. Place each of the three disc samples into the reactor in the following manner: attach the disc to the copper gasket with double-sided tape, then place the copper gasket between the 6-inch (15.24 cm) diameter ConFlat double-sided flange between the normal sealing position. As the reactor is sealed together and fastened to form the reactor body, the ConFlat double-sided flange seal penetrates the membrane and forms an airtight seal with conventional copper gasket sealing mechanisms. This sealed reactor wall also helps to hold the membrane in place and seals the edges of the membrane to prevent any reactive gases from bypassing the membrane.

[0064] The reactor with the membranes in place was then connected to the vacuum and gas handling system as previously described. The first reactive gas supply tank was filled with t...

example 2

[0069] The experiment was carried out roughly according to the procedure of Example 1, except that the substrate used was substrate B instead of substrate A; the reactor, first and second inlet tubes, and purge gas tube were heated to 60° C. with heaters; and the number of repetitions was 20 times instead of 35. After performing 20 repetitions, the reactor was opened and the surface energy of each of the three discs of Sample B was evaluated. Each disk was found to have a surface energy exceeding 86 dynes / cm, indicating a high degree of hydrophilicity.

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Abstract

An article of manufacture includes a body having an inlet and an outlet, and at least a portion of at least one porous non-ceramic substrate positioned such that the porous polymeric substrate separates the inlet from the outlet. The porous non-ceramic substrate has a conformal coating on at least a portion of its interior surfaces.

Description

[0001] Cross references to related patent applications [0002] This patent application claims the benefit of US Provisional Patent Application Nos. 61 / 244,696 and 61 / 244,713, both filed September 22, 2009, the disclosures of which are incorporated herein by reference in their entirety. technical field [0003] The present invention relates to articles having a porous non-ceramic substrate having a conformal coating on its inner surface. Background technique [0004] The atomic layer deposition (ALD) process was originally developed for thin film electroluminescent (TFEL) flat panel displays. Over the years, interest in ALD has grown significantly and silicon-based microelectronics (wafers) have come into focus due to the process' ability to produce very thin conformal films by controlling film composition and thickness at the atomic level . ALD is also well known for its ability to coat high aspect ratio surfaces due to its self-limiting sequential surface reaction proce...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/20C23C14/04C23C14/06C23C14/14
CPCD06M11/45C23C16/45546C23C16/45525D06C29/00C23C16/403C08J2201/038D06M11/58D06M23/005C23C16/45555C23C16/045H01L21/02532D06M11/36H01L21/02422C08J9/365H01L21/02428D06M11/53Y10T428/1362Y10T428/1376Y10T428/249958Y10T442/2861C23C16/545
Inventor 比尔·H·道奇
Owner 3M INNOVATIVE PROPERTIES CO