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Space-confined target with spark spread for spark evaporation

A spark and body technology, applied in the direction of vacuum evaporation plating, coating, discharge tube, etc., can solve unexpected problems

Active Publication Date: 2016-05-04
OERLIKON SURFACE SOLUTIONS AG PFAFFIKON
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the problem that arises in this solution is that, due to the coating of the baffle surface, which becomes conductive, the cathode ignition point can move to the baffle surface and thus lead to undesired defects in the layer to be formed. made of

Method used

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  • Space-confined target with spark spread for spark evaporation
  • Space-confined target with spark spread for spark evaporation
  • Space-confined target with spark spread for spark evaporation

Examples

Experimental program
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Embodiment Construction

[0017] According to the first embodiment, as in image 3 The target 1 shown in , comprises a target material 3 , for example titanium, with a recess 5 in the central region for receiving an electrically insulatingly mounted sheet 7 , which is held on an insulating pin 9 by means of a retaining ring 11 . A non-conductive material such as ceramic is suitable for the insulating pin 9 . The distance between the target material 3 and the sheet 7 is approximately between 1.5 mm and 3.5 mm. If the distance is still greater, there is the risk that the cathode burning point will destroy the sheet 7 which is at floating potential. If the distance is again smaller than 1.5 mm, there is the risk of electrical contact between the target material 3 and the sheet 7 due to the growth of the coating material.

[0018] For the production of the target, preferably first, a plate made of the target material is applied to a carrier plate (not shown), which serves both for cooling and for electri...

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PUM

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Abstract

The invention relates to a target for an ARC source, having a first body (3) consisting of a material to be evaporated, which first body (3) has a surface provided for evaporation substantially in a plane, wherein the plane This surface in the encloses a central area, which is characterized in that a second body (7) designed to be electrically insulated from the first body (3), preferably configured as a sheet, is arranged in the central area, so that the second body (7 ) are essentially unable to provide electrons for maintaining the spark.

Description

technical field [0001] The invention relates to a target for a spark evaporation source, a corresponding spark evaporation source and a method for producing a layer by means of spark evaporation. Background technique [0002] In the following text, spark evaporation is to be understood as a physical coating method by means of evaporation under vacuum, in which the cathode ignition point evaporates the material from the surface provided for this purpose. The device in which the material to be evaporated is provided is hereinafter referred to as target. The target together with the ignition means for the spark ignition and the voltage source for maintaining the spark constitute the ARC source. The restriction on the diffusion of the cathode burning point is hereinafter referred to as the ARC restriction. [0003] ARC sources operate primarily with an applied magnetic field. In this case, a magnetic arrangement is arranged on the target, which leads to such a distribution of...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J37/305H01J37/12C23C14/32
CPCH01J37/305H01J37/32614C23C14/325H01J37/3053H01J37/3266H01J37/3444
Inventor S.克拉斯尼策J.哈格曼
Owner OERLIKON SURFACE SOLUTIONS AG PFAFFIKON