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Orthogonal double-grating based detecting device for synchronous phase shift common-light path interference and detecting method therefor

A technology of interference detection and synchronous phase shift, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of low measurement accuracy, complicated and difficult operation, high cost, etc., and achieve simple mapping relationship, convenient and flexible operation, and low device cost Effect

Inactive Publication Date: 2014-12-03
HARBIN ENG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The purpose of the present invention is to solve the problems that the existing optical phase shift interference detection method is complex and difficult to operate, and requires a high-quality λ / 4 wave plate, high cost, and low measurement accuracy, and provides a synchronous phase shift based on orthogonal double gratings Common optical path interference detection device and detection method

Method used

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  • Orthogonal double-grating based detecting device for synchronous phase shift common-light path interference and detecting method therefor
  • Orthogonal double-grating based detecting device for synchronous phase shift common-light path interference and detecting method therefor
  • Orthogonal double-grating based detecting device for synchronous phase shift common-light path interference and detecting method therefor

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specific Embodiment approach 1

[0036] Specific implementation mode 1: the following combination Figure 1 to Figure 5 To explain this embodiment, the common optical path interference detection device based on split light synchronization phase shift in this embodiment includes a light source 1, which is characterized in that it also includes a polarizer 2, a collimated beam expanding system 3, and two λ / 4 Wave plate 4, object to be measured 5, rectangular window 6, first lens 7, one-dimensional periodic amplitude grating 8, one-dimensional periodic phase grating 9, second lens 10, four-quadrant polarizer group 11, image sensor 12, and computer 13 , Where λ is the light wavelength of the light source 1,

[0037] The one-dimensional periodic amplitude grating 8 and the one-dimensional periodic phase grating 9 form a double grating, and the one-dimensional periodic amplitude grating 8 and the one-dimensional periodic phase grating 9 are placed orthogonally in the direction of the grating lines;

[0038] The light b...

specific Embodiment approach 2

[0048] Specific embodiment 2: This embodiment further explains the first embodiment. The object 5 to be measured is placed in the rectangular window 6, the beam incident side of the rectangular window 6, or the beam exit side of the rectangular window 6, and the object 5 to be measured is along the x-axis direction The length of is less than or equal to L / 2, and the object 5 to be measured is located directly behind one of the λ / 4 wave plates 4.

[0049] The length of the object 5 to be measured along the x-axis direction can be selected as required, as long as it is less than or equal to L / 2.

specific Embodiment approach 3

[0050] Specific implementation manner 3: This implementation manner further describes the implementation manner 1 or 2, the one-dimensional periodic amplitude grating 8 is a binary one-dimensional periodic amplitude grating, a sine one-dimensional periodic amplitude grating or a cosine one-dimensional periodic amplitude grating.

[0051] In this embodiment, the one-dimensional periodic amplitude grating 8 adopts a Ronchi grating with a period d=50 μm.

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Abstract

The invention provides an orthogonal double-grating based detecting device for synchronous phase shift common-light path interference and a detecting method for the orthogonal double-grating based detecting device, belonging to the field of the detection of optical interference. The invention aims at solving the problem that the existing optical phase shift interference detecting method is complex and hard to operate, and is high in cost and low in measurement precision caused by a high-quality lambda / 4 wave plate. The invention has the scheme that a light beam emitted out of a light source is incident into a light receiving surface of a collimating and beam expanding system through a polarizing film, an emergent light beam collimated and expanded by the collimating and beam expanding system is incident into a first lens through two lambda / 4 wave plates, an object to be tested and a rectangular window opening, an emergent light beam collected by the first lens is incident into a second lens through the double gratings formed by a one-dimensional cyclic range grating and a one-dimensional cyclic phase shift grating, a diffraction light beam transmitted by the second lens is incident into a four-quadrant polarizing film set, an emergent light beam of the four-quadrant polarizing film set is received by an imaging sensor, and an image signal output end of the imaging sensor is connected with an image input end of a computer, and obtains the phase distribution of the object to be tested.

Description

Technical field [0001] The invention relates to a synchronous phase shift common optical path interference detection device and a detection method based on orthogonal double gratings, and belongs to the field of optical interference detection. Background technique [0002] The optical phase shift interferometer is a non-contact, high-precision full-field measurement tool, which is widely used in the detection of optical surfaces, deformation and thickness. Traditional optical interference detection methods include Tyman-Green interferometry, Mach-Zehnder interferometry and shearing interferometry. Among them, Tyman-Green interferometry and Mach-Zehnder interferometry use separate optical path interference, that is, the reference beam and the measurement beam interfere through different paths, which are easily affected by external vibration and temperature fluctuations; shear interferometry uses common Optical path interference, that is, the reference beam and the measuring beam ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B9/02G01B11/06G01B11/24G01B11/16
Inventor 单明广钟志郝本功
Owner HARBIN ENG UNIV
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