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Method for manufacturing a bending transducer, a micro pump and a micro valve, micro pump and micro valve

一种换能器、微型阀的技术，应用在泵、阀装置、机器/发动机等方向，能够解决无法实现常闭阀致密性要求等问题，达到减少去极化风险、减少闭死容积、高行程容积的效果

Active Publication Date: 2013-01-16
FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG EV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

If the deflection is too large in the downward direction, the valve may not achieve the tightness required for a normally closed valve, or may open with slight pressure in the direction opposite to the diaphragm

Method used

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  • Method for manufacturing a bending transducer, a micro pump and a micro valve, micro pump and micro valve
  • Method for manufacturing a bending transducer, a micro pump and a micro valve, micro pump and micro valve
  • Method for manufacturing a bending transducer, a micro pump and a micro valve, micro pump and micro valve

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[0129]Other embodiments may include pump bodies having integrally formed valve inlet and valve outlet structures 130 and 140 comprising materials such as steel, stainless steel or spring stainless steel, synthetic materials or polymers, wherein , these pump bodies may comprise a single layer or multiple layers to form a valve structure. Therefore, further embodiments of the micropump may include a pump body and a pump diaphragm made of metal, synthetic material, or polymer, or stacks thereof. Making pump bodies and pump diaphragms from metal or polymers is less expensive to produce and provides higher elasticity, eg, lower Young's modulus, than silicon pump bodies and pump diaphragms.

[0130] Other embodiments of the present invention provide micropumps having a driven diaphragm, wherein the driven diaphragm moves between an upwardly pre-bulged or pre-twisted position and a substantially planar position, wherein the pump diaphragm disposed facing the pump body The unevenness...

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Abstract

A method of manufacturing a bending transducer comprising a drive means and a membrane is provided, the method comprising: providing the membrane (110) and the drive means (210); and applying a production signal (Uproduction) to the drive means (210) during a bonding of the drive means to the membrane (110) such that the drive means is pre-stressed after the bonding, wherein the production signal is of a same kind as an operation signal to operate the bending transducer.

Description

technical field [0001] The invention relates to methods of manufacturing bending transducers, micropumps and microvalves as well as micropumps and microvalves comprising bending transducers manufactured according to the method. Background technique [0002] According to the prior art, there are a large number of different miniature diaphragm pumps, the drive concepts used are electromagnetic, thermal and piezoelectric drive principles. However, almost all miniature diaphragm pumps available on the market are driven by the piezoelectric drive principle. [0003] The compressibility of the micropump is an important parameter, which defines the foam resistance and pressure resistance of the micropump when gas is the pumping medium. Also since fluid pump foam may enter the pump chamber at any time, the compressibility of the liquid pump is also practically defined by the compressibility (in addition to large actuation diaphragm force and low valve leakage). Compressibility is ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16K99/00F04B43/04H01L41/09H10N30/20
CPCH01L41/0973F16K99/0015F16K99/0001F16K2099/0094F16K2099/008F04B43/043F16K99/0048Y10T29/49236F16K99/0057H10N30/2048H10N30/073H10N30/2047
Inventor 马丁·里希特马丁·瓦克尔勒马库斯·赫茨
Owner FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG EV
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