Aluminum alloy material with high-precision super-smooth surface, polishing disk, polishing agent and polishing method

Abstract

The invention discloses a polishing method for an aluminum alloy material with a high-precision super-smooth surface and further discloses a polishing disk and a polishing agent. The polishing disk comprises a bottom disk body, a polishing pad, a polishing film and a compression piece, wherein the polishing film is coated outside the polishing pad, the compression piece hoops the edge of the polishing film and enables the polishing pad to be closely attached to the lower surface of the bottom disk body, and the polishing pad is made of polydimethylsiloxane (PDMS). The polishing agent is mainly prepared by water, diadust, hydrogen peroxide and a surfactant. The polishing method includes performing primary polishing on the surface of the aluminum alloy material through a single-point diamond turning process and then performing secondary polishing on the surface after the primary polishing through a computer-control optical surface forming process, the polishing disk and the polishing agent. The aluminum alloy material with the high-precision super-smooth surface (the roughness Ra<=2nm and the root-mean-square (RMS) value<=lambda / 10) can be obtained according to the polishing disk, the polishing agent and the polishing method.

Description

technical field [0001] The invention belongs to the technical field of surface polishing of optical materials, and in particular relates to a polished aluminum alloy material and corresponding polishing equipment, polishing liquid and polishing process. Background technique [0002] Aluminum alloys have very high reflectivity over a broad spectral range of infrared, visible, and all the way into ultraviolet light, making them a good choice for multispectral imaging applications. In addition, aluminum alloy has good processing performance, light weight, low price, and high thermal conductivity. Aluminum alloy is also the preferred support material for many optical systems, especially in aerospace applications. The support structure and optical components are made of the same aluminum material to avoid thermal stress caused by different thermal expansion coefficients. However, due to the poor polishing performance of aluminum alloy and easy oxidation, it is difficult to obtai...

AI Technical Summary

Problems solved by technology

However, due to the poor polishing performance of aluminum alloy, it is easy to oxidize, so it is difficult to obtain a high-precision ultra-smooth surface

[0003]Single-point diamond turning of aluminum alloy can obtain a mirror surface with roughness Ra (Ra: arithmetic mean deviation of contour) better than 5nm, but periodic turning will remain on the surface of aluminum alloy Knife pattern, affecting image quality

Single-point diamond turning is essentially a Fancheng method. The surface accuracy of the turned aluminum alloy is limited by the motion accuracy of the lathe and the clamping deformation of the workpiece, and it is difficult to obtain a high-precision surface shape.

Mechanochemical polishing (CMP) is a method that can achieve global planarization. NASA Goddard Space Center mentioned in US 6966820B1 that adding ink to the polishing solution can obtain an ultra-smooth surface for polishing aluminum mirrors, but it cannot achieve fixed points of materials. Quantitative removal; Intel Corporation has announced in CN101208399A Chinese patent document that a kind of particle size is less than or equal to the aluminum alloy polishing abrasive that the precipitated silica abrasive of 100 nanometers and chelating buffering agent are formed; People such as Hebei University of Technology Liu Yuling use dioxide Silica sol, oxidant and self-made chelating agent have achieved certain results in polishing metal alloys; however, the surface quality obtained by the existing aluminum alloy polishing process is still poor, and the polishing accuracy and polishing quality need to be further improved

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