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Device and method for calibrating vacuum gauge for work

A technology of a calibration device and a calibration method, applied in the field of measurement, can solve the problems of increased calibration uncertainty, inability to achieve, and low accuracy of a vacuum gauge, and achieve the effect of reducing measurement uncertainty and improving calibration accuracy

Active Publication Date: 2014-06-25
NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The disadvantage of this system is that the ultimate vacuum of the device can only reach 10 -3 Pa, unable to achieve 1×10 -4 Pa~1×10 -1 Accurate calibration of the working vacuum gauge in the Pa range; the equipped standard vacuum gauge has low precision, which increases the calibration uncertainty

Method used

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  • Device and method for calibrating vacuum gauge for work
  • Device and method for calibrating vacuum gauge for work

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Embodiment 1

[0028] Such as figure 1 As shown, a working vacuum gauge 8 calibration device, said device includes: gas supply system 1, fine-tuning valve 2, standard vacuum gauge 3, standard container 4, small hole 5, bellows stop valve 6, calibration chamber 7, Working vacuum gauge 8, mechanical pump 9, isolation valve 10, molecular pump 11, all metal flapper valve 12;

[0029] Gas supply system 1, fine-tuning valve 2, standard container 4, small hole 5, bellows stop valve 6, calibration chamber 7, working vacuum gauge 8 are connected in sequence, standard vacuum gauge 3 is connected to standard container 4, mechanical pump 9 is connected to standard The container 4 is connected, the molecular pump 11 is connected with the calibration chamber 7 through the all-metal flapper valve 12, one end of the isolation valve 10 is connected with the mechanical pump 9, and the other end is connected with the molecular pump 11;

[0030] Among them, the gas supply system 1 is a gas cylinder or an air b...

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PUM

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Abstract

The invention discloses a device and a method for calibrating a vacuum gauge for work, which belong to the measurement field. The device comprises an air supply system, a micrometering valve, a standard vacuum gauge, a standard container, a small hole, a bellows globe valve, a calibration chamber, the vacuum gauge for work, a mechanical pump, an isolating valve, a molecular pump and an all-metal gate valve. The device disclosed by the invention has the advantages that the calibration lower limit of the vacuum gauge for work is extended, the uncertainty of measurement is reduced, the calibration accuracy is enhanced, and the calibration problem of the vacuum gauge for work at the vacuum degree being in a range of 1*10<-4>Pa to 1*10<-1>Pa is solved.

Description

technical field [0001] The invention relates to a working vacuum gauge calibration device and method, especially to achieve a vacuum degree of 1×10 -4 Pa~1×10 -1 The invention relates to a device and method for accurately calibrating a vacuum gauge for working in the Pa range, and belongs to the field of measurement. Background technique [0002] Working vacuum gauges are widely used in various fields of industrial production, and their measurement ranges are mostly 1×10 -4 Pa~1×10 5 Pa. The calibration of working vacuum gauges is an important research direction in the field of vacuum measurement. The document "Xu Hong, Zhang Shuling, Tang Jingyuan. On-site measurement and calibration of heat conduction vacuum gauges for work. The Sixth Vacuum Academic Exchange Conference in Three Provinces and One City in East China, 2009" introduced the portable vacuum calibration system currently used in the calibration of vacuum gauges for work. The system is equipped with a mechani...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L27/00
Inventor 孙雯君冯焱成永军赵澜盛学民
Owner NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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