Static sampling introduction device and method of calibrating pressure leak hole

Abstract

The invention discloses a static sampling introduction device and a method of a calibrating pressure leak hole, which belong to the field of measurement. The device and the method utilize pumping performance of a non-evapotranspiration type getter pump and introduce helium accumulated by the calibrated pressure leak hole into a calibration chamber, and a helium ion flow signal is generated on a quadrupole mass spectrometer. Helium with known quantity is prepared and is introduced into the calibration chamber in the same method, a helium ion flow signal is generated on the quadrupole mass spectrometer, and leakage rate of the calibrated pressure leak hole is obtained through simple calculation. The method greatly shortens accumulative time for the pressure leak hole, simultaneously improves a helium partial pressure value in the calibration chamber and calibration efficiency, extends calibration lower limit, and enables pressure leak hole with leak rate value smaller than 1*10-7Pa m<3> / s to be accurately calibrated.

Description

technical field [0001] The invention relates to a static sampling positive pressure leak calibration device and method, in particular, the static sampling technology is used to realize a leak rate value less than 1×10 -7 Pam 3 The invention relates to a device and method for accurately calibrating a positive pressure leakage hole per second, belonging to the field of measurement. Background technique [0002] The calibration of positive pressure standard leaks (referred to as positive pressure leaks) is an important research direction in the field of vacuum measurement. The first-level vacuum metering station in my country adopts the quantitative gas dynamic comparison method to calibrate positive pressure leaks, and the calibration range is (1×10 -7 ~1×10 -4 )Pa m 3 / s. In practical applications, it is also necessary to use some leak rate values ​​less than 1×10 -7 Pam 3 / s positive pressure leak, the quantitative gas dynamic comparison method cannot accurately calib...

AI Technical Summary

Problems solved by technology

The disadvantage of this method is that when the calibration leak rate is 1×10 -7 Pam 3 / s positive pressure leak, the required accumulation time is too long (usually 8 hours of accumulation time), resulting in low calibration efficiency, and at this time the helium partial pressure measured by the quadrupole mass spectrometer is low, which will cause relatively high large measurement uncertainty

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