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Optical scanning device based on MEMS (Micro-electromechanical Systems) micromirror

An optical scanning and micro-mirror technology, applied in optics, optical components, mirrors, etc., can solve the problems of small scanning range and complex optical path structure, and achieve the effect of simple structure, extended scanning range and wide scanning range

Active Publication Date: 2013-03-06
无锡微文半导体科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, although different designs of MEMS micromirrors have different performances, the corners of MEMS micromirrors are limited by factors such as materials, processes or costs at this stage. Small (usually less than 30 degrees), so the scan range is small, and large angle scans (especially lateral circular scans) are difficult to achieve
At the same time, because the direction of the incident light and the reflected light of the MEMS micromirror are different, it is also very difficult to realize the forward scanning of the MEMS micromirror.
[0005] In summary, the existing optical scanning devices based on MEMS micromirror are limited by the performance of MEMS micromirror, and generally have the shortcomings of small scanning range and complex optical path structure

Method used

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  • Optical scanning device based on MEMS (Micro-electromechanical Systems) micromirror
  • Optical scanning device based on MEMS (Micro-electromechanical Systems) micromirror
  • Optical scanning device based on MEMS (Micro-electromechanical Systems) micromirror

Examples

Experimental program
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Effect test

Embodiment 1

[0032] The optical scanning device in this embodiment, such as Figure 5 As shown, it includes: an optical collimator 1 , a mirror 2 , a MEMS micromirror 3 , a sleeve 4 , and an exit window 5 . In order to prevent the optical path from being blocked and realize circular scanning, the MEMS micromirror in this embodiment is an electromagnetically driven two-dimensional MEMS micromirror that does not need wire connection. In order to make the structure more compact, such as Figure 7 As shown, the middle part of the mirror 2 is hollow, and the shape and size of the hollow part are adapted to the external shape and size of the optical collimator. The mirror 2 is sleeved outside the optical collimator 1 through the hollow part. The whole mirror surface of the reflector 2 is a semi-conical shape with a tapered mouth pointing to the MEMS micromirror 3 . The optical collimator 1 , mirror 2 and MEMS micromirror 3 are all sealed in the casing 4 to protect each optical device, wherein ...

Embodiment 2

[0035] The optical scanning device in this implementation also includes: optical collimator 1, mirror 2, MEMS micromirror 3, sleeve tube 4, exit window 5, its structure is as follows Image 6 shown. In the present embodiment, the mirror surface of reflector 2 is a semi-conical shape with a tapered mouth pointing to the light source as a whole; correspondingly, according to the reflection direction of reflector 2, the head of sleeve tube 4 is a transparent exit window 5 as a whole; MEMS micromirror 3 is fixed on the side wall of the casing 4 through the pillar 6, in order not to block the light, the pillar 6 is made of transparent material. The rest of this example is the same as Example 1.

[0036] The incident light emitted by the light source from the left is collimated by the optical collimator 1 and passes through the reflector 2, then hits the mirror surface of the MEMS micromirror 3, and the mirror surface of the MEMS micromirror 3 reflects the light to the outer circle...

Embodiment 3

[0038] The optical scanning device in the present embodiment also includes: optical collimator 1, mirror 2, MEMS micromirror 3, sleeve pipe 4, exit window 5, and its structure is as follows Figure 7 shown. In the present embodiment, the mirror surface of reflector 2 is made of two coaxial semi-conical shapes, as shown in the figure, the semi-conical cone opening of the outer ring points to the MEMS micromirror 3, and the semi-conical cone opening of the inner ring points to the light source , according to the description of Embodiments 1 and 2, it can be seen that the reflective mirror surface of the outer ring will reflect light to the side, and the reflective mirror surface of the inner ring will reflect light forward; correspondingly, the exit window 5 in this embodiment is as shown in the figure , consisting of the head of the casing 4 and a ring connected to the head of the casing 4, which is equivalent to the combination of the exit windows in Embodiment 1 and Embodimen...

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Abstract

The invention discloses an optical scanning device based on an MEMS (Micro-electromechanical Systems) micromirror. The optical scanning device based on the MEMS micromirror comprises an optical collimator and the MEMS micromirror. The incident ray emitted by a light source and collimated by the optical collimator is reflected by the MEMS micromirror. A reflector is arranged on a light path between the light source and the MEMS micromirror. The middle part of the reflector is hollow or transparent, so that the incident ray can pass through normally. A reflective mirror face is arranged on the outer ring of the reflector to reflect ray reflected by the MEMS micromirror to a scanning sample. According to the optical scanning device based on the MEMS micromirror provided by the invention, the scanning range is effectively expanded, and lateral circular scanning and forward circular scanning can be realized through a design of the reflective mirror face. Compared with the prior art, the optical scanning device based on the MEMS micromirror provided by the invention is wider in scanning range, simple in structure, and low in cost.

Description

technical field [0001] The present invention relates to an optical scanning device, in particular to an optical scanning device based on a MEMS (Micro-Electro-Mechanic System, micro-electro-mechanical system) micromirror. Background technique [0002] Optical scanning devices are currently widely used in fields such as medical imaging, projectors, spectrometers, and graphic code readers. For example, scanning probes used in medical imaging. Miniaturization is the main development trend of optical scanning devices. MEMS micromirrors are especially suitable for miniaturized optical scanning devices due to their compact structure, simple control, and low power consumption. Therefore, optical scanning devices based on MEMS micromirrors The device has become the mainstream of micro-optical scanning technology at present. [0003] The basic principle of the MEMS micromirror is to precisely control the driving force of the micromirror mirror rotation through the micro-electromech...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B26/10G02B5/10
Inventor 谢会开周亮陈巧
Owner 无锡微文半导体科技有限公司
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