Chamfering machine capable of processing non-standard silicon wafer

A technology of chamfering machines and silicon wafers, which is applied in the field of chamfering machines, can solve the problems of not being able to process non-standard silicon wafers, etc., and achieve the effect of improving production and processing capabilities and increasing processing capabilities
CN102962743BActive Publication Date: 2015-06-24ZHONGHUAN ADVANCED SEMICON MATERIALS CO LTD +1
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Patents(China)
Current Assignee / Owner
ZHONGHUAN ADVANCED SEMICON MATERIALS CO LTD
Publication Date
2015-06-24

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Abstract

The invention provides a chamfering machine capable of processing a non-standard silicon wafer. The chamfering machine comprises a correcting system, wherein the correcting system comprises a wafer conveying arm; a round wafer absorption head is arranged at one end of the wafer conveying arm; the wafer absorption head is provided with two arch-shaped correcting clamp plates; strip-shaped positioning blocks are arranged at the two ends of each correcting clamp plate; one end of each positioning block is fixed to each correcting clamp plate through a shaft; each positioning block can be used for adjusting an angle according to the practical processing need; and a positioning wheel is arranged at the other end of each positioning block. The chamfering machine has the benefits as follows: the processing capability of the non-standard silicon wafer is improved under the condition that the original processing capability of equipment is maintained, so that the production and processing capabilities of the equipment are improved.
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Description

technical field

[0001] The invention relates to a chamfering machine, in particular to a chamfering machine capable of processing non-standard silicon wafers. Background technique

[0002] The processing of silicon wafers generally requires the use of chamfering equipment. With the increasing application of non-standard silicon wafers, the existing chamfering machines need to have a certain ability to process non-standard silicon wafers. D37-378 / YL domestic chamfering The machine is mainly used for the edge processing of semiconductor silicon wafers, which can automatically realize accurate chamfering, but there is a technical problem that it does not have the ability to process non-standard silicon wafers with a diameter less than 73mm. Contents of the invention

[0003] The problem to be solved by the present invention is to provide a chamfering machine capable of processing non-standard silicon wafers.

[0004] In order to solve the above technical problems, the techni...

Claims

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