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Common light path interference microscopy detection device and method based on synchronization carrier frequency phase shift

A technology of interference microscopy and detection devices, which is applied in the optical field, can solve the problems of complex data processing, reduction, and low light utilization rate, and achieve the effects of high light utilization rate, convenient and flexible operation, and simple and easy methods

Inactive Publication Date: 2013-03-13
HARBIN ENG UNIV
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  • Summary
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  • Claims
  • Application Information

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Problems solved by technology

This method eliminates the zero-frequency component by subtracting two phase-shifted interference patterns, thereby reducing the requirements for the carrier frequency in the interference pattern and improving the utilization of the spatial resolution and spatial bandwidth product of the CCD. The light utilization rate of the method is low, the data processing is complicated, and the carrier frequency needs to be determined by measuring the fringe, and the separate optical path is still used

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  • Common light path interference microscopy detection device and method based on synchronization carrier frequency phase shift
  • Common light path interference microscopy detection device and method based on synchronization carrier frequency phase shift
  • Common light path interference microscopy detection device and method based on synchronization carrier frequency phase shift

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specific Embodiment approach 1

[0039] Specific implementation mode one: the following combination Figure 1 to Figure 6 Describe this embodiment mode, the co-optical path interference microscope detection device based on synchronous carrier frequency phase shifting described in this embodiment mode, it comprises light source 1, linear polarizer 2, collimation beam expander system 3, first dichroic prism 4, second Dichroic prism 5, first λ / 4 wave plate 6, correction objective lens 7, microscope objective lens 8, object to be measured 9, second λ / 4 wave plate 10, third λ / 4 wave plate 11, rectangular window 12, the first A Fourier lens 13, a one-dimensional periodic grating 14, a second Fourier lens 15, a polarizer group 16, an image sensor 17 and a computer 18, wherein λ is the wavelength of light emitted by the light source 1,

[0040] The light beam emitted by the light source 1 enters the light receiving surface of the collimated beam expander system 3 after passing through the linear polarizer 2, and the ou...

specific Embodiment approach 2

[0051] Specific embodiment two: this embodiment will further illustrate embodiment one, the first dichroic prism 4 and the second dichroic prism 5 are non-polarizing dichroic prisms, the second λ / 4 wave plate 10 and the third λ / 4 wave plate 11 The direction of the fast axis is the same.

specific Embodiment approach 3

[0052] Specific embodiment three: this embodiment will further illustrate embodiment one, the first dichroic prism 4 and the second dichroic prism 5 are polarization dichroic prisms, the second λ / 4 wave plate 10 and the third λ / 4 wave plate 11 The directions of the fast axes are perpendicular to each other.

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Abstract

The invention discloses a common light path interference microscopy detection device and a method based on synchronization carrier frequency phase shift, belongs to the field of optics and overcomes the defects in prior art. The technical scheme includes that a light source is opened so that light beams emitted by the light source passes a line polaroid and are subjected to collimation beam expanding through a collimation beam expanding system to form a parallel polarized light, the light beams are emitted into a first beam splitter prism and subjected to reflection and transmission through the first beam splitter prism to finally form a reference light beam and an object light beam respectively, the reference light beam and the object light beam are gathered into a rectangular window side by side to sequentially pass through a first Fourier lens, a one-dimensional cycle optical grating, a second Fourier lens and a polariod group, polarized light beams emerged by the polariod group can generate a interference pattern on an imaging sensor plane, the interference pattern acquired by a computer is divided according to the size of a small window of the rectangular window to obtain two interference patterns, and the phase position distribution of an object to be detected can be obtained through calculation.

Description

technical field [0001] The invention relates to a common optical path interference microscopic detection device and method based on synchronous carrier frequency phase shifting, and belongs to the field of optics. Background technique [0002] Interference microscopy combines interference technology and microscopic magnification technology, which can accurately analyze the three-dimensional shape of objects and the phase information of phase-type objects. It is an ideal method for measuring the three-dimensional shape and phase distribution of tiny objects. [0003] In 2006, the Swiss company Lyncee Tec launched the DHM-1000 digital holographic microscope for the first time, which can be used to measure the three-dimensional shape and phase distribution of tiny objects. However, it is necessary to tilt the reference light to obtain a sufficiently large carrier frequency to separate the zero-frequency component, real image, and conjugate image of the interference pattern on ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/02G01B9/04
Inventor 钟志单明广郝本功刁鸣张雅彬窦峥
Owner HARBIN ENG UNIV
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