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Gas sealing device for low-speed rotation of main shaft

A technology of gas sealing and main shaft sealing, applied in bearing components, shafts and bearings, mechanical equipment, etc., can solve problems such as gas leakage, and achieve the effect of ensuring cleanliness and gas tightness

Active Publication Date: 2015-01-07
BEIJING SEVENSTAR ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved by the present invention is to provide a gas sealing device for the low-speed rotation of the main shaft, so as to overcome the defect of gas leakage at the rotating place when the main shaft rotates at low speed in the prior art

Method used

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  • Gas sealing device for low-speed rotation of main shaft
  • Gas sealing device for low-speed rotation of main shaft
  • Gas sealing device for low-speed rotation of main shaft

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Embodiment Construction

[0018] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0019] In the description of the present invention, it should be noted that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", " The orientations or positional relationships indicated by "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying Describes, but does not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and operate in a specific orientation, and therefore sh...

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Abstract

The invention relates to the technical field of gas sealing, and particularly relates to a gas sealing device for low-speed rotation of a main shaft. The gas sealing device comprises the main shaft and a bearing connected with the main shaft, wherein the bearing is fixed on a ventilating bearing block and is connected with the main shaft in a sealing manner; the end surface of an inner ring of the bearing is in sealing connection with an annular sealing ring in the peripheral direction of the inner ring of the bearing; an annular grease tank is correspondingly formed in the ventilation bearing block and is filled with grease; and the annular sealing ring is immersed in the grease and is driven to rotate in the annular grease tank by a driving device. The gas sealing device provided by the invention can effectively solve the problem of gas sealing for the low-speed rotation of the main shaft, and can ensure air tightness, and a great quantity of impurities and oil can not be generated to damage a technological environment, so that the cleanness of the technological environment is ensured.

Description

technical field [0001] The invention relates to the technical field of gas sealing, in particular to a gas sealing device for a main shaft rotating at a low speed. Background technique [0002] At present, a structure in which the rotating spindle rotates at a low speed is installed in a variety of equipment, and a structure in which gas passes through the middle vent hole of the rotating spindle to the top for process testing is required. According to the requirements of different processes, the pressure of the gas passing through the rotating spindle needs to be guaranteed. At the same time, if the gas passing through the rotating spindle is a harmful gas, it must be ensured that the gas cannot leak out; for example, the rotating spindle of the cleaning machine at this stage needs nitrogen to pass through the spindle. Center air vent for jet cleaning of wafer backside. However, similar structures at the present stage cannot completely solve the gas leakage problem, and ev...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F16C33/76
Inventor 王浩
Owner BEIJING SEVENSTAR ELECTRONICS CO LTD