Electromagnetic damping vibration isolator with coplace air flotation orthogonal decoupling and rolling knuckle bearing angle decoupling
A joint bearing and electromagnetic damping technology, which is applied in bearings, shafts and bearings, springs/shock absorbers, etc., can solve the problem of poor positioning accuracy of air spring vibration isolators, inability to decouple effective angular motion degrees of freedom, and vibration isolators that cannot Realize precise positioning and other problems, and achieve the effect of solving low positioning accuracy
Active Publication Date: 2013-04-24
HARBIN INST OF TECH
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Benefits of technology
In this new design for vibration insulators that reduces unwanted noise levels without compromising their ability to perform precise alignment or compensational movements. It involves eliminating rigidity constraints by introducing a single axis (Z)-axis), instead relying solely upon compression springs. By utilizing these features, the device becomes more flexible and suitable for various applications where high precision requirements may exist. Overall, this technology improves efficiency, reliability, and quality in mechanical systems used during manufacturing processes while maintaining desired results.
Problems solved by technology
Technological Problem addressed in this patented patent describes two main challenges faced during designing large scale vacilage inspection (MVI), including achieving precision alignment within 0.1-10 nano meters while maintaining sufficient sturdy space and prevention against deformation caused by external forces or temperature changes. Existing solutions either require expensive materials like tantalum nitride or metal block systems, leading to increased costs and reduced productivity.
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[0041] Specific embodiments of the present invention are given below in conjunction with the accompanying drawings.
[0042] An electromagnetic damping vibration isolator with coplanar air bearing orthogonal decoupling and rolling joint bearing angle decoupling, consisting of an upper mounting plate 1, a lower mounting plate 2, a clean compressed air source 3, an air pipe 26 and a vibration isolator body 4 The vibration isolator main body 4 is installed between the upper mounting plate 1 and the lower mounting plate 2, and the clean compressed air source 3 is connected to the vibration isolator main body 4 through the air pipe 26. In the structure of the vibration isolator main body 4, the sleeve 6 The lower surface and the lower mounting plate 2 are lubricated and supported by the axial bearing flat air bearing surface 21, the piston barrel 5 is installed in the sleeve 6 with an undercut, and are lubricated and supported with the sleeve 6 by the radial bearing cylindrical air ...
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Abstract
The invention discloses an electromagnetic damping vibration isolator with coplace air flotation orthogonal decoupling and rolling knuckle bearing angle decoupling and belongs to the technical field of precise vibration isolation. A sleeve of the main body of the vibration isolator and a lower installation plate are lubricated and supported by an air flotation surface, a piston sleeve and the sleeve are lubricated and supported by the air flotation surface, an electromagnetic damper is used for attenuating vibrating energy and improving positioning stability, the freedom of the horizontal linear motion between an upper installation plate and the lower installation plate is decoupled through a coplace orthogonal air flotation guide rail, the freedom of angular motion between the upper installation plate and the lower installation plate is decoupled through a rolling knuckle bearing, and a voice coil motor, a displacement sensor, a limiting switch and controller and a driver form a position closed-loop feedback control system to accurately control the relative positions of the upper installation plate and the lower installation plate. The electromagnetic damping vibration isolator has the advantages of being zero in three-dimensional rigidity, high in positioning accuracy, and capable of performing linear motion freedom decoupling and angular motion freedom decoupling, and can effectively solve the high-performance vibration isolation problem of ultra-precise measurement instruments and processing equipment, particularly step scanning photoetching machines.
Description
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