The invention discloses a magnetic suspension vibration
isolator with a coplanar air floatation orthogonal decoupling function and an angular decoupling function by the aid of a sliding joint bearing, and belongs to the technical field of precision
vibration isolation. Space between a sleeve of a vibration
isolator body and a lower mounting plate is carried by a magnetic suspension
thrust bearing, space between a
piston barrel and the sleeve is lubricated and supported by an air floatation plane, the degree of freedom of horizontal linear movement between an upper mounting plate and the lower mounting plate is decoupled by coplanar orthogonal air floatation guide rails, the degree of freedom of angular movement between the upper mounting plate and the lower mounting plate is decoupled by the sliding joint bearing, and
voice coil motors, displacement sensors, limit switches, a controller and a driver form a position closed-loop
feedback control system to precisely control relative positions of the upper mounting plate and the lower mounting plate. The magnetic suspension vibration
isolator has the advantages of approximately zero three-dimensional stiffness, high positioning precision and capabilities of decoupling the degree of freedom of linear movement and decoupling the degree of freedom of angular movement, and can effectively realize high-performance
vibration isolation for ultra-precision measuring instruments and
processing equipment, and particularly for step-scan
lithography machines.