Eddy current damping vibration isolator of double-layer air-flotation orthogonal decoupling and flexible film angle decoupling
A technology of eddy current damping and vibration isolator, which is applied in the direction of spring/shock absorber, vibration suppression adjustment, non-rotational vibration suppression, etc. With problems such as high natural frequency, achieve good decoupling effect, solve the effect of low positioning accuracy and high positioning accuracy
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[0036] Specific embodiments of the present invention are given below in conjunction with the accompanying drawings.
[0037] An eddy current damping vibration isolator with double-layer air flotation orthogonal decoupling and flexible membrane angle decoupling, consisting of an upper mounting plate 1, a lower mounting plate 2, a clean compressed air source 3, an air pipe 26 and a vibration isolator body 4 The vibration isolator main body 4 is installed between the upper mounting plate 1 and the lower mounting plate 2, and the clean compressed air source 3 is connected to the vibration isolator main body 4 through the air pipe 26. In the structure of the vibration isolator main body 4, the sleeve 6 The lower surface of the lower surface and the air bearing plate 34 are lubricated and supported by the axial bearing plane air bearing surface 21, the flexible membrane 5 is installed on the upper end of the sleeve 6, and is pressed and sealed by the pressure ring 22, the upper press...
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