Electromagnetic damping vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of flexible membrane
An electromagnetic damping and flexible membrane technology, applied in the direction of spring/shock absorber, vibration suppression adjustment, non-rotational vibration suppression, etc., can solve the problems of string membrane resonance, poor positioning accuracy of air spring vibration isolator, angular stiffness and inherent High frequency and other problems, achieve good decoupling effect, solve the effect of low positioning accuracy and high positioning accuracy
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[0035] Specific embodiments of the present invention are given below in conjunction with the accompanying drawings.
[0036] An electromagnetic damping vibration isolator with coplanar air bearing orthogonal decoupling and flexible membrane angle decoupling, consisting of an upper mounting plate 1, a lower mounting plate 2, a clean compressed air source 3, a gas pipe 26 and a vibration isolator body 4, The vibration isolator main body 4 is installed between the upper mounting plate 1 and the lower mounting plate 2, and the clean compressed air source 3 is connected to the vibration isolator main body 4 through the air pipe 26. In the structure of the vibration isolator main body 4, the sleeve 6 The lower surface and the lower mounting plate 2 are lubricated and supported by the axial bearing plane air bearing surface 21, the flexible membrane 5 is installed on the upper end of the sleeve 6, and is pressed and sealed by the pressure ring 22, the upper pressure plate 7a of the pr...
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