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Electromagnetic damping vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of flexible membrane

An electromagnetic damping and flexible membrane technology, applied in the direction of spring/shock absorber, vibration suppression adjustment, non-rotational vibration suppression, etc., can solve the problems of string membrane resonance, poor positioning accuracy of air spring vibration isolator, angular stiffness and inherent High frequency and other problems, achieve good decoupling effect, solve the effect of low positioning accuracy and high positioning accuracy

Active Publication Date: 2013-04-17
HARBIN INST OF TECH
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AI Technical Summary

Problems solved by technology

The problems of this method are as follows: 1) Due to the constraints of material properties and structural stiffness, the amplitude of vertical and horizontal stiffness reduction of the vibration isolator is limited; 2) The vertical and horizontal positioning accuracy of the air spring vibration isolator is very poor, It cannot meet the requirements of the photolithography process; 3) To achieve a lower horizontal stiffness requires a larger pendulum length, resulting in excessive height of the vibration isolator, prone to string-film resonance, and poor stability
The problems of this solution are: 1) In the disclosed technical solution, the vibration isolator cannot achieve precise positioning; 2) In the patent EP1803965A2, there is no degree of freedom of angular movement around the horizontal axis between the upper and lower mounting plates. The angular stiffness and natural frequency are very high; patents EP1803970A2 and US20080193061A1 use rubber blocks to provide angular freedom of rotation around the horizontal axis for the upper and lower mounting plates, but due to the high angular stiffness of the rubber blocks, the angular freedom of motion cannot be effectively achieved Degree decoupling, the friction between the decoupling mechanism components of the angular motion freedom introduces additional stiffness, which restricts the vibration isolation performance
However, the proposed technical solution still does not solve the problem of decoupling the precise positioning of the vibration isolator and the angular motion freedom of the upper and lower mounting plates.

Method used

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  • Electromagnetic damping vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of flexible membrane
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  • Electromagnetic damping vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of flexible membrane

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Embodiment Construction

[0035] Specific embodiments of the present invention are given below in conjunction with the accompanying drawings.

[0036] An electromagnetic damping vibration isolator with coplanar air bearing orthogonal decoupling and flexible membrane angle decoupling, consisting of an upper mounting plate 1, a lower mounting plate 2, a clean compressed air source 3, a gas pipe 26 and a vibration isolator body 4, The vibration isolator main body 4 is installed between the upper mounting plate 1 and the lower mounting plate 2, and the clean compressed air source 3 is connected to the vibration isolator main body 4 through the air pipe 26. In the structure of the vibration isolator main body 4, the sleeve 6 The lower surface and the lower mounting plate 2 are lubricated and supported by the axial bearing plane air bearing surface 21, the flexible membrane 5 is installed on the upper end of the sleeve 6, and is pressed and sealed by the pressure ring 22, the upper pressure plate 7a of the pr...

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Abstract

The invention discloses an electromagnetic damping vibration isolator with a coplanar air floatation orthogonal decoupling function and an angular decoupling function by the aid of a flexible membrane, and belongs to the technical field of precision vibration isolation. Space between a sleeve of a vibration isolator body and a lower mounting plate is lubricated and supported by an air floatation plane, electromagnetic dampers are used for attenuating vibration energy and improving the positioning stability, the degree of freedom of horizontal linear movement between an upper mounting plate and the lower mounting plate is decoupled by coplanar orthogonal air floatation guide rails, the degree of freedom of angular movement between the upper mounting plate and the lower mounting plate is decoupled by the flexible membrane, and voice coil motors, displacement sensors, limit switches, a controller and a driver form a position closed-loop feedback control system to precisely control relative positions of the upper mounting plate and the lower mounting plate. The electromagnetic damping vibration isolator has the advantages of zero three-dimensional stiffness, high positioning precision and capabilities of sufficiently decoupling the degree of freedom of linear movement and sufficiently decoupling the degree of freedom of angular movement, and can effectively realize high-performance vibration isolation for ultra-precision measuring instruments and processing equipment, and particularly for step-scan lithography machines.

Description

technical field [0001] The invention belongs to the technical field of precision vibration isolation, and mainly relates to an electromagnetic damping vibration isolator with coplanar air floatation orthogonal decoupling and flexible film angle decoupling. Background technique [0002] With the continuous improvement of ultra-precision machining and measurement accuracy, environmental vibration has become an important factor restricting the improvement of the accuracy and performance of ultra-precision machining equipment and measuring instruments. In particular, the ultra-large-scale integrated circuit processing equipment represented by the step-scan lithography machine is extremely technically intensive and complex, and the key technical indicators have reached the limit of the existing technology, representing the highest level of ultra-precision processing equipment. Precision vibration isolation has become the core key technology in this type of equipment; the line wid...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16F15/027F16F15/03
Inventor 谭久彬崔俊宁王雷
Owner HARBIN INST OF TECH
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