35results about How to "Ideal linear damping characteristics" patented technology

The invention provides an eddy current damping zero stiffness vibration isolator for flexible membrane angle decoupling and belongs to the technical field of precision vibration isolation. A sleeve of a vibration isolator main body and a lower installation plate are lubricated and supported through an air floating surface, an eddy current damper attenuates vibration energy and improves positioning stability, angular motion freedom degree between an upper installation plate and the lower installation plate is decoupled through a flexible membrane, a position closed-loop feedback control system is formed by a voice coil motor, a displacement sensor, a limit switch, a controller and an actuator to perform accurate control on the relative position of the upper installation plate and the lower installation plate. The eddy current damping zero stiffness vibration isolator for the flexible membrane angle decoupling has the advantages of being free of three-dimensional stiffness, high in positioning accuracy and angle decoupling and capable of obtaining very low inherent frequency and prominent ultra-low frequency vibration isolation performance, thereby effectively solving problem of high-performance vibration isolation in ultra-precise measurement devices and processing devices, in particular to step scanning photoetching machines.

The invention discloses an eddy-current damping vibration isolator with coplace air flotation orthogonal decoupling and rolling knuckle bearing angle decoupling and belongs to the technical field of precise vibration isolation. A sleeve of the main body of the vibration isolator and a lower installation plate are lubricated and supported by an air flotation surface, a piston sleeve and the sleeve are lubricated and supported by the air flotation surface, an eddy-current damper is used for attenuating vibrating energy and improving positioning stability, the freedom of the horizontal linear motion between an upper installation plate and the lower installation plate is decoupled through a coplace orthogonal air flotation guide rail, the freedom of angular motion between the upper installation plate and the lower installation plate is decoupled through a rolling knuckle bearing, and a voice coil motor, a displacement sensor, a limiting switch and controller and a driver form a position closed-loop feedback control system to accurately control the relative positions of the upper installation plate and the lower installation plate. The eddy-current damping vibration isolator has the advantages of being zero in three-dimensional rigidity, high in positioning accuracy, and capable of performing linear motion freedom decoupling and angular motion freedom decoupling, and can effectively solve the high-performance vibration isolation problem of ultra-precise measurement instruments and processing equipment, particularly step scanning photoetching machines.

A rolling knuckle bearing angle decoupling electromagnetic damping zero-stiffness vibration isolator belongs to the technical field of precision vibration isolation. Lubrication and supporting between a sleeve of a vibration isolator main body and a lower installation plate and between a piston cylinder and the sleeve are carried out through an air floatation face respectively, an electromagnetic damping device is used for damping vibration energy and improving location stability, freedom of angular motion between the upper installation plate and the lower installation plate is decoupled through a rolling knuckle bearing, and a position closed loop feedback control system is formed by a voice coil motor, a displacement sensor, a limit switch, a controller and a driver to accurately control relative locations of the upper installation plate and the lower installation plate. The vibration isolator has characteristics of zero three-dimensional stiffness, high positional accuracy and angular decoupling, can have low inherent frequency and prominent low frequency and ultra-low frequency vibration isolation performance, and can effectively solve high-performance vibration isolation problems of ultra-precise measurement device and processing equipment, in particular to a step scanning photoetching machine.

An eddy current damping vibration isolator of double-layer air-flotation orthogonal decoupling and two-dimensional flexible hinge angle decoupling belongs to the technical field of precise vibration isolation. An air-flotation face is used for lubricating and supporting between a sleeve of a vibration isolator main body and an air-flotation plate. An eddy current damper is used for attenuating vibration energy and improving stability. An air-flotation face is respectively used for lubricating and supporting between the air-flotation plate and a lower installing plate, between the air-flotation plate and a piston cylinder and between the air-flotation plate and the sleeve. A horizontal linear motion freedom degree between an upper installing plate and the lower installing plate is decoupled through a double-layer orthogonal air-flotation guide track, and an angle motion freedom degree is decoupled through a two-dimensional flexible hinge. A voice coil motor, a displacement sensor, a limit switch, a controller and a driver form a position closed loop feedback control system so as to conduct precise control for relative positions of the upper installing plate and the lower installing plate. The eddy current damping vibration isolator has the advantage of being free of rigidity in three dimensions, high in location precision and capable of decoupling the linear motion freedom degree and the angle motion freedom degree and can effectively satisfy the demands of ultra precise measurement instruments and machining devices especially stepping scanning photoetching machines for the high-performance vibration isolator.

The invention discloses an eddy-current damping vibration isolator with a coplanar air floatation orthogonal decoupling function and an angular decoupling function by the aid of a sliding joint bearing, and belongs to the technical field of precision vibration isolation. Space between a sleeve of a vibration isolator body and a lower mounting plate and space between a piston barrel and the sleeve are respectively lubricated and supported by air floatation planes, eddy-current dampers are used for attenuating vibration energy and improving the positioning stability, the degree of freedom of horizontal linear movement between an upper mounting plate and the lower mounting plate is decoupled by coplanar orthogonal air floatation guide rails, the degree of freedom of angular movement between the upper mounting plate and the lower mounting plate is decoupled by the sliding joint bearing, and voice coil motors, displacement sensors, limit switches, a controller and a driver form a position closed-loop feedback control system to precisely control relative positions of the upper mounting plate and the lower mounting plate. The eddy-current damping vibration isolator has the advantages of zero three-dimensional stiffness, high positioning precision and capabilities of decoupling the degree of freedom of linear movement and decoupling the degree of freedom of angular movement, and can effectively realize high-performance vibration isolation for ultra-precision measuring instruments and processing equipment, and particularly for step-scan lithography machines.

The invention discloses an electromagnetic damping vibration isolator with a coplanar air floatation orthogonal decoupling function and an angular decoupling function by the aid of a flexible membrane, and belongs to the technical field of precision vibration isolation. Space between a sleeve of a vibration isolator body and a lower mounting plate is lubricated and supported by an air floatation plane, electromagnetic dampers are used for attenuating vibration energy and improving the positioning stability, the degree of freedom of horizontal linear movement between an upper mounting plate and the lower mounting plate is decoupled by coplanar orthogonal air floatation guide rails, the degree of freedom of angular movement between the upper mounting plate and the lower mounting plate is decoupled by the flexible membrane, and voice coil motors, displacement sensors, limit switches, a controller and a driver form a position closed-loop feedback control system to precisely control relative positions of the upper mounting plate and the lower mounting plate. The electromagnetic damping vibration isolator has the advantages of zero three-dimensional stiffness, high positioning precision and capabilities of sufficiently decoupling the degree of freedom of linear movement and sufficiently decoupling the degree of freedom of angular movement, and can effectively realize high-performance vibration isolation for ultra-precision measuring instruments and processing equipment, and particularly for step-scan lithography machines.

The invention discloses an electromagnetic damping vibration isolator with coplace air flotation orthogonal decoupling and rolling knuckle bearing angle decoupling and belongs to the technical field of precise vibration isolation. A sleeve of the main body of the vibration isolator and a lower installation plate are lubricated and supported by an air flotation surface, a piston sleeve and the sleeve are lubricated and supported by the air flotation surface, an electromagnetic damper is used for attenuating vibrating energy and improving positioning stability, the freedom of the horizontal linear motion between an upper installation plate and the lower installation plate is decoupled through a coplace orthogonal air flotation guide rail, the freedom of angular motion between the upper installation plate and the lower installation plate is decoupled through a rolling knuckle bearing, and a voice coil motor, a displacement sensor, a limiting switch and controller and a driver form a position closed-loop feedback control system to accurately control the relative positions of the upper installation plate and the lower installation plate. The electromagnetic damping vibration isolator has the advantages of being zero in three-dimensional rigidity, high in positioning accuracy, and capable of performing linear motion freedom decoupling and angular motion freedom decoupling, and can effectively solve the high-performance vibration isolation problem of ultra-precise measurement instruments and processing equipment, particularly step scanning photoetching machines.

An eddy current damping vibration isolator of double-layer air-flotation orthogonal decoupling and rolling knuckle bearing angle decoupling belongs to the technical field of precise vibration isolation. An air-flotation face is used for lubricating and supporting between a sleeve of a vibration isolator main body and an air-flotation plate. An eddy current damper is used for attenuating vibration energy and improving stability. An air-flotation face is respectively used for lubricating and supporting between the air-flotation plate and a lower installing plate, between the air-flotation plate and a piston cylinder and between the air-flotation plate and the sleeve. A horizontal linear motion freedom degree between an upper installing plate and the lower installing plate is decoupled through a double-layer orthogonal air-flotation guide track, and an angle motion freedom degree is decoupled through a rolling knuckle bearing. A voice coil motor, a displacement sensor, a limit switch, a controller and a driver form a position closed loop feedback control system so as to conduct precise control for relative positions of the upper installing plate and the lower installing plate. The eddy current damping vibration isolator has the advantage of being free of rigidity in three dimensions, high in location precision and capable of decoupling the linear motion freedom degree and the angle motion freedom degree and can effectively achieve high-performance vibration isolation in ultra precise measurement instruments and machining devices, especially stepping scanning photoetching machines.

The invention provides an eddy current damping zero stiffness vibration isolator for flexible membrane angle decoupling and belongs to the technical field of precision vibration isolation. A sleeve of a vibration isolator main body and a lower installation plate are lubricated and supported through an air floating surface, an eddy current damper attenuates vibration energy and improves positioning stability, angular motion freedom degree between an upper installation plate and the lower installation plate is decoupled through a flexible membrane, a position closed-loop feedback control system is formed by a voice coil motor, a displacement sensor, a limit switch, a controller and an actuator to perform accurate control on the relative position of the upper installation plate and the lower installation plate. The eddy current damping zero stiffness vibration isolator for the flexible membrane angle decoupling has the advantages of being free of three-dimensional stiffness, high in positioning accuracy and angle decoupling and capable of obtaining very low inherent frequency and prominent ultra-low frequency vibration isolation performance, thereby effectively solving problem of high-performance vibration isolation in ultra-precise measurement devices and processing devices, in particular to step scanning photoetching machines.

The invention belongs to the technical field of precision vibration isolation and relates to a double-layer orthogonal air floatation decoupling and two-dimensional flexible hinge angular decoupling electromagnetic damping vibration isolator. Air floatation surfaces are used for lubricating and supporting between a sleeve of a vibration isolator body and an air floatation plate, between the air floatation plate and a lower mounting plate as well as between a piston cylinder and the sleeve, an electromagnetic damper is used for attenuating vibration energy and improving stability between the sleeve and the air floatation plate, degree of freedom of horizontal linear motion between an upper mounting plate and the lower mounting plate is decoupled by double-layer orthogonal air floatation guide rails, degree of freedom of angular motion is decoupled by a two-dimensional flexible hinge, and voice coil motors, displacement sensors, limit switches, a controller and a drive form a position closed-loop feedback control system so as to precisely control the relative position of the upper mounting plate and the lower mounting plate. The electromagnetic damping vibration isolator has the advantages of zero three-dimensional rigidity, high positioning precision and decoupling of degree of freedom of linear motion and degree of freedom of angular motion, and is capable of effectively meeting the requirements of ultra-precise measuring instruments and processing equipment, particularly of step-scan lithography machines on high-performance vibration isolators.

An eddy current damping vibration isolator of double-layer air-flotation orthogonal decoupling and flexible film angle decoupling belongs to the technical field of precise vibration isolation. An air-flotation face is used for lubricating and supporting between a sleeve of a vibration isolator main body and an air-flotation plate. An eddy current damper is used for attenuating vibration energy. An air-flotation face is used for lubricating and supporting between the air-flotation plate and a lower installing plate. A horizontal linear motion freedom degree between an upper installing plate and the lower installing plate is decoupled through a double-layer orthogonal air-flotation guide track, and an angle motion freedom degree between the upper installing plate and the lower installing plate is decoupled through a flexible film. A voice coil motor, a displacement sensor, a limit switch, a controller and a driver form a position closed loop feedback control system so as to conduct precise control for relative positions of the upper installing plate and the lower installing plate. The eddy current damping vibration isolator has the advantage of being free of rigidity in three dimensions, high in location precision and capable of fully decoupling the linear motion freedom degree and the angle motion freedom degree and can effectively achieve high-performance vibration isolation in ultra precise measurement instruments and machining devices, especially stepping scanning photoetching machines.

The invention discloses an electromagnetic damping vibration isolator with coplace air flotation orthogonal decoupling and two-dimensional flexible hinge angle decoupling and belongs to the technical field of precise vibration isolation. A sleeve of the main body of the vibration isolator and an air flotation plate are lubricated and supported by an air flotation surface, a piston sleeve and the sleeve are lubricated and supported by the air flotation surface, an electromagnetic damper is used for attenuating vibrating energy and improving positioning stability, the freedom of the horizontal linear motion between an upper installation plate and a lower installation plate is decoupled through a coplace orthogonal air flotation guide rail, the freedom of angular motion between the upper installation plate and the lower installation plate is decoupled through a two-dimensional flexible hinge, and a voice coil motor, a displacement sensor, a limiting switch and controller and a driver form a position closed-loop feedback control system to accurately control the relative positions of the upper installation plate and the lower installation plate. The electromagnetic damping vibration isolator has the advantages of being zero in three-dimensional rigidity, high in positioning accuracy, and capable of performing linear motion freedom decoupling and angular motion freedom decoupling, and can effectively meet the high-performance requirements of ultra-precise measurement instruments and processing equipment, particularly step scanning photoetching machines.

The invention relates to an electromagnetic damping zero-stiffness vibration isolator for air floatation ball bearing angle decoupling and belongs to the technical field of precise vibration isolation. A sleeve and a lower installation board of a vibration isolator main body are lubricated and supported by an air floatation surface, and a piston barrel and the sleeve are lubricated and supported by the air floatation surface. An electromagnetic damper is used for attenuating vibration energy and improving positioning stability. The angle motion freedom between an upper installation board and the lower installation board is decoupled through an air floatation ball bearing. A voice coil motor, a displacement sensor, a limit switch, a controller and a driver form a position closed-loop feedback control system which accurately controls the relative positions of the upper installation board and the lower installation board. The electromagnetic damping zero-stiffness vibration isolator has the characteristics of three-dimensional zero-stiffness, high positioning accuracy and angle decoupling, can obtain ultra-low inherent frequency and highlighted low frequency / ultra-low frequency vibration isolation performance, and accordingly effectively solves the problem of high-performance vibration isolation of ultra precise measurement instruments and processing devices, especially stepping scanning photo-etching machines.

A coplane air floatation orthogonal decoupling and flexible membrane angle decoupling eddy-current damping vibration isolator belongs to the technical field of precision vibration isolation. Lubrication and supporting between a sleeve of a vibration isolator main body and a lower installation plate are carried out through an air floatation face, an eddy-current damping device is used for damping vibration energy and improving location stability, freedom of horizontal rectilinear motion between an upper installation plate and the lower installation plate is decoupled through a coplane orthogonal air floatation guide rail, freedom of angular motion between the upper installation plate and the lower installation plate is decoupled through an air floatation ball bearing, and a position closed loop feedback control system is formed by a voice coil motor, a displacement sensor, a limit switch, a controller and a driver to accurately control relative locations of the upper installation plate and the lower installation plate. The vibration isolator has characteristics of zero three-dimensional stiffness, high positional accuracy and rectilinear motion freedom and angular motion freedom decoupling, and can effectively solve high-performance vibration isolation problems of ultra-precise measurement device and processing equipment, in particular to a step scanning photoetching machine.

The invention belongs to the technical field of precision vibration isolation and relates to a double-layer orthogonal air floatation decoupling and air floatation ball bearing angular decoupling electromagnetic damping vibration isolator. Air floatation surfaces are used for lubricating and supporting between a sleeve of a vibration isolator body and an air floatation plate, between the air floatation plate and a lower mounting plate as well as between a piston cylinder and the sleeve, an electromagnetic damper is used for attenuating vibration energy and improving stability between the sleeve and the air floatation plate, degree of freedom of horizontal linear motion between an upper mounting plate and the lower mounting plate is decoupled by double-layer orthogonal air floatation guide rails, degree of freedom of angular motion between the upper mounting plate and the lower mounting plate is decoupled by an air floatation ball bearing, and voice coil motors, displacement sensors, limit switches, a controller and a drive form a position closed-loop feedback control system so as to precisely control the relative position of the upper mounting plate and the lower mounting plate. The electromagnetic damping vibration isolator has the advantages of zero three-dimensional rigidity, high positioning precision and decoupling of degree of freedom of linear motion and degree of freedom of angular motion, and is capable of effectively achieving high-performance vibration isolation in ultra-precise measuring instruments and processing equipment, particularly in step-scan lithography machines.

The invention discloses an eddy-current damping zero-stiffness vibration isolator with an angular decoupling function by the aid of a sliding joint bearing, and belongs to the technical field of precision vibration isolation. Space between a sleeve of a vibration isolator body and a lower mounting plate and space between a piston barrel and the sleeve are respectively lubricated and supported by air floatation planes, eddy-current dampers are used for attenuating vibration energy and improving the positioning stability, the degree of freedom of angular movement between an upper mounting plate and the lower mounting plate is decoupled by the sliding joint bearing, and voice coil motors, displacement sensors, limit switches, a controller and a driver form a position closed-loop feedback control system to precisely control relative positions of the upper mounting plate and the lower mounting plate. The eddy-current damping zero-stiffness vibration isolator has the advantages of zero stiffness in perpendicular and horizontal directions, high positioning precision, the angular decoupling function, capability of acquiring extremely low natural frequency and outstanding low-frequency / ultra-low-frequency vibration isolation performance, and accordingly effectively realizes high-performance vibration isolation for ultra-precision measuring instruments and processing equipment, and particularly for step-scan lithography machines.

The invention belongs to the technical field of precision vibration isolation and discloses an electromagnetic damping zero-rigidity vibration isolator with a flexible film for angular decoupling. A lower mounting plate and a sleeve of a vibration isolator body are lubricated and supported through a pneumatic flotation face, and attenuation of vibration energy and improvement of positioning stability are realized through an electromagnetic damper. Angular motion freedom degree between an upper mounting plate and the lower mounting plate is decoupled through the flexible film, and a voice coil motor, a displacement sensor, a limiting switch, a controller and a drive form a position closed loop feedback control system to precisely control relative position of the upper mounting plate and the lower mounting plate. The electromagnetic damping zero-rigidity vibration isolator has the advantages of three-dimensional zero rigidity, high positioning precision and angular decoupling, extremely low inherent frequency and outstanding ultralow-frequency vibration isolation performance can be obtained, and accordingly the problem of high-performance vibration isolation in ultra precise measurement instruments and processing equipment, especially step scanning photoetching machines can be effectively solved.

The invention belongs to the technical field of precision vibration isolation and relates to a double-layer orthogonal air floatation decoupling and flexible membrane angular decoupling electromagnetic damping vibration isolator. Air floatation surfaces are used for lubricating and supporting between a sleeve of a vibration isolator body and an air floatation plate as well as between the air floatation plate and a lower mounting plate, an electromagnetic damper is used for attenuating vibration energy between the sleeve and the air floatation plate, degree of freedom of horizontal linear motion between an upper mounting plate and the lower mounting plate is decoupled by double-layer orthogonal air floatation guide rails, degree of freedom of angular motion between the upper mounting plate and the lower mounting plate is decoupled by a flexible membrane, and voice coil motors, displacement sensors, limit switches, a controller and a drive form a position closed-loop feedback control system so as to precisely control the relative position of the upper mounting plate and the lower mounting plate. The electromagnetic damping vibration isolator vibration isolator has the advantages of zero three-dimensional rigidity, high positioning precision and decoupling of degree of freedom of linear motion and degree of freedom of angular motion, and is capable of effectively achieving high-performance vibration isolation in ultra-precise measuring instruments and processing equipment, particularly in step-scan lithography machines.

An electromagnetic damping vibration isolator of double-layer air-flotation orthogonal decoupling and sliding knuckle bearing angle decoupling belongs to the technical field of precise vibration isolation. An air-flotation face is used for lubricating and supporting between a sleeve of a vibration isolator main body and an air-flotation plate, between the air-flotation plate and a lower installing plate, between the air-flotation plate and a piston cylinder and between the air-flotation plate and the sleeve. An electromagnetic damper is used for attenuating vibration energy and improving stability between the sleeve and the air-flotation plate. A horizontal linear motion freedom degree between an upper installing plate and the lower installing plate is decoupled through a double-layer orthogonal air-flotation guide track, and an angle motion freedom degree is decoupled through a sliding knuckle bearing. A voice coil motor, a displacement sensor, a limit switch, a controller and a driver form a position closed loop feedback control system so as to conduct precise control for relative positions of the upper installing plate and the lower installing plate. The electromagnetic damping vibration isolator has the advantage of being free of rigidity in three dimensions, high in location precision and capable of decoupling the linear motion freedom degree and the angle motion freedom degree and can effectively achieve high-performance vibration isolation in ultra precise measurement instruments and machining devices, especially stepping scanning photoetching machines.

The invention relates to an eddy current damping zero-stiffness vibration isolator for air floatation ball bearing angle decoupling and belongs to the technical field of precise vibration isolation. A sleeve and a lower installation board of a vibration isolator main body are lubricated and supported by an air floatation surface, and a piston barrel and the sleeve are lubricated and supported by the air floatation surface. An eddy current damper is used for attenuating vibration energy and improving positioning stability. The angle motion freedom between an upper installation board and the lower installation board is decoupled through an air floatation ball bearing. A voice coil motor, a displacement sensor, a limit switch, a controller and a driver form a position closed-loop feedback control system which accurately controls the relative positions of the upper installation board and the lower installation board. The eddy current damping zero-stiffness vibration isolator has the characteristics of three-dimensional zero-stiffness, high positioning accuracy and angle decoupling, can obtain ultra-low inherent frequency and highlighted low frequency / ultra-low frequency vibration isolation performance, and accordingly effectively solves the problem of high-performance vibration isolation of ultra precise measurement instruments and processing devices, especially stepping scanning photo-etching machines.

A two-dimensional flexible hinge angle decoupling eddy current damping zero-rigidity vibration isolator belongs to the technical field of precise vibration isolation. Air floatation surfaces are respectively disposed between a sleeve of a vibration isolator and a lower mounting plate and between a piston cylinder and the sleeve for lubrication and support. An eddy current damper attenuates vibration energy to improved positioning stability. Angle motion freedom between the upper mounting plate and the lower mounting plate is decoupled by a two-dimensional flexible hinge. A voice coil motor, a displacement sensor, a limit switch, a controller and a driver form a position closed loop feedback control system which is used for precisely controlling relative positions of the upper mounting plate and the lower mounting plate. The two-dimensional flexible hinge angle decoupling eddy current damping zero-rigidity vibration isolator has the characteristics of three-dimensional zero rigidity, high positioning precision and angle decoupling, has ultralow inherent frequency and outstanding low / ultralow frequency vibration isolation performance, and can effectively achieve high-performance vibration isolation of ultra-precise measuring instrument and machining devices, especially stepping scan lithography machines.

The invention discloses an electromagnetic damping vibration isolator with a coplanar air floatation orthogonal decoupling function and an angular decoupling function by the aid of a sliding joint bearing, and belongs to the technical field of precision vibration isolation. Space between a sleeve of a vibration isolator body and a lower mounting plate and space between a piston barrel and the sleeve are respectively lubricated and supported by air floatation planes, magnetic dampers are used for attenuating vibration energy and improving the positioning stability, the degree of freedom of horizontal linear movement between an upper mounting plate and the lower mounting plate is decoupled by coplanar orthogonal air floatation guide rails, the degree of freedom of angular movement between the upper mounting plate and the lower mounting plate is decoupled by the sliding joint bearing, and voice coil motors, displacement sensors, limit switches, a controller and a driver form a position closed-loop feedback control system to precisely control relative positions of the upper mounting plate and the lower mounting plate. The electromagnetic damping vibration isolator has the advantages of zero three-dimensional stiffness, high positioning precision and capabilities of decoupling the degree of freedom of linear movement and decoupling the degree of freedom of angular movement, and can effectively realize high-performance vibration isolation for ultra-precision measuring instruments and processing equipment, and particularly for step-scan lithography machines.

The invention discloses an eddy-current damping zero-stiffness vibration isolator with an angular decoupling function by the aid of a rolling joint bearing, and belongs to the technical field of precision vibration isolation. Space between a sleeve of a vibration isolator body and a lower mounting plate and space between a piston barrel and the sleeve are respectively lubricated and supported by air floatation planes, eddy-current dampers are used for attenuating vibration energy and improving the positioning stability, the degree of freedom of angular movement between an upper mounting plate and the lower mounting plate is decoupled by the rolling joint bearing, and voice coil motors, displacement sensors, limit switches, a controller and a driver form a position closed-loop feedback control system to precisely control relative positions of the upper mounting plate and the lower mounting plate. The eddy-current damping zero-stiffness vibration isolator has the advantages of zero three-dimensional stiffness, high positioning precision, the angular decoupling function, extremely low natural frequency and outstanding low-frequency / ultra-low-frequency vibration isolation performance, and can effectively realize high-performance vibration isolation for ultra-precision measuring instruments and processing equipment, and particularly for step-scan lithography machines.

A coplane air floatation orthogonal decoupling and air floatation ball bearing angle decoupling eddy-current damping vibration isolator belongs to the technical field of precision vibration isolation. Lubrication and supporting between a sleeve of a vibration isolator main body and a lower installation plate and between a piston cylinder and the sleeve are carried out through an air floatation face respectively, an eddy-current damping device is used for damping vibration energy and improving location stability, freedom of horizontal rectilinear motion between an upper installation plate and the lower installation plate is decoupled through a coplane orthogonal air floatation guide rail, freedom of angular motion between the upper installation plate and the lower installation plate is decoupled through an air floatation ball bearing, and a position closed loop feedback control system is formed by a voice coil motor, a displacement sensor, a limit switch, a controller and a driver to accurately control relative locations of the upper installation plate and the lower installation plate. The vibration isolator has characteristics of zero three-dimensional stiffness, high positional accuracy and rectilinear motion freedom and angular motion freedom decoupling, and can effectively solve high-performance vibration isolation problems of ultra-precise measurement device and processing equipment, in particular to a step scanning photoetching machine.

An electromagnetic damping vibration isolator of double-layer air-flotation orthogonal decoupling and rolling knuckle bearing angle decoupling belongs to the technical field of precise vibration isolation. An air-flotation face is used for lubricating and supporting between a sleeve of a vibration isolator main body and an air-flotation plate. An electromagnetic damper is used for attenuating vibration energy and improving stability. An air-flotation face is respectively used for lubricating and supporting between the air-flotation plate and a lower installing plate, between the air-flotation plate and a piston cylinder and between the air-flotation plate and the sleeve. A horizontal linear motion freedom degree between an upper installing plate and the lower installing plate is decoupled through a double-layer orthogonal air-flotation guide track, and an angle motion freedom degree is decoupled through a rolling knuckle bearing. A voice coil motor, a displacement sensor, a limit switch, a controller and a driver form a position closed loop feedback control system so as to conduct precise control for relative positions of the upper installing plate and the lower installing plate. The electromagnetic damping vibration isolator has the advantage of being free of rigidity in three dimensions, high in location precision and capable of decoupling the linear motion freedom degree and the angle motion freedom degree and can effectively achieve high-performance vibration isolation in ultra precise measurement instruments and machining devices, especially stepping scanning photoetching machines.