Vertical large displacement micro-electromechanical system (MEMS) micromirror and processing technology

Abstract

The invention relates to a vertical large displacement micro-electromechanical system (MEMS) micromirror and the processing technology. The vertical large displacement MEMS micromirror comprises a micromirror frame (1), a micromirror body (2) and driving arms (3). The edge of the micromirror body (2) is connected with the micromirror frame (1) through the driving arms (3). Each driving arm (3) comprises two straight girders (4) and three double-membrane bimorph structure connection parts (5) corresponding to the two straight girders (4). A plurality of heating resistors (7) are arranged on each double-membrane bimorph structure connection part (5). First electric conduction wires are further arranged on the driving arms (3) and connected with the heating resistors (7). The vertical large displacement MEMS micromirror has the advantages of being capable of enabling the micromirror body (2) to be in the position of vertical large displacement opposite to the micromirror frame (1), enlarging movement path of the micromirror body (2) and improving working efficiency of the MEMS micromirror.

Description

technical field [0001] The invention relates to a vertical large-displacement MEMS micromirror and a processing technology. Background technique [0002] Miniaturization, high performance, low cost, and large quantities are the pursuit goals of today's device manufacturing. MEMS technology came into being at this time and was widely used by the majority of manufacturers. Devices manufactured using MEMS technology can be mainly divided into two categories. One is purely miniaturized traditional devices, such as micro-optical platforms, whose advantages are concentrated in expanding the use of miniaturized systems; Devices that cannot be produced by traditional methods, such as geomagnetic sensors. [0003] As an outstanding representative of microelectromechanical systems (MEMS), MEMS micromirrors are rich in variety and excellent in performance. Of course, the vigorous development of MEMS micromirrors is also inseparable from the urgent market demand for MEMS micromirrors...

AI Technical Summary

Problems solved by technology

[0005] But the existing MEMS micromirror, because the structure of its driving arm is single, makes the height difference between the mirror body and the micromirror frame in the MEMS micromirror almost zero, so in the actual application process, will greatly limit the MEMS micromirror. The trajectory of the mirror body, for the MEMS micromirror, the smaller the trajectory of the mirror body, it directly means the working effect of this type of MEMS micromirror, which in turn affects the working efficiency of the MEMS micromirror.

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