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Thickness uniformity control method and chassis adjustment of dlc deposited film

A technology with uniform film thickness and control method, which is applied in the direction of metal material coating process, coating, gaseous chemical plating, etc., can solve the problem of stripping of the lower edge of the workpiece, and achieve uniform peeling, not easy to fall off, and uniform electric field distribution Effect

Active Publication Date: 2017-01-25
常州鑫立离子技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The invention provides a film thickness uniformity control method and an adjustment chassis of a DLC deposition film, which are used to overcome the defects in the prior art, realize the uniform deposition of the workpiece, and solve the problem that the workpiece is lowered due to uneven distribution of the electric field in the prior art. Technical issues with edge release

Method used

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  • Thickness uniformity control method and chassis adjustment of dlc deposited film
  • Thickness uniformity control method and chassis adjustment of dlc deposited film
  • Thickness uniformity control method and chassis adjustment of dlc deposited film

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Embodiment 1

[0023] Such as image 3 As shown, the present invention provides a method for controlling the thickness uniformity of DLC deposition film, which includes the following steps:

[0024] Step 1. Make an adjustment chassis made of metal material, place the workpiece 1 to be deposited on the adjustment chassis 2, and adapt the workpiece 1 to the adjustment chassis 2, and adjust the exposed peripheral side 22 of the chassis 2 and the workpiece 1 A continuous transition is formed between the surfaces of the deposited film; the adjustment chassis 2 is in the shape of a ball table, and the radius of the upper bottom surface 21 of the adjustment chassis 2 is equal to the radius of the bottom surface of the workpiece 1 to be deposited;

[0025] Step 2. Place the workpiece and the adjustment chassis in a vacuum electric field environment;

[0026] Step 3, deposit a DLC film on the surface of the workpiece 1 to be deposited and the exposed peripheral side surface 22 of the adjustment chassis 2;

...

Embodiment 2

[0032] Such as Image 6 As shown, this embodiment provides a method for controlling the uniformity of film thickness of the DLC film deposition adjustment chassis 2. The adjustment chassis 2 is made of metal, and the adjustment chassis 2 is used to interact with the workpiece to be deposited on it. 1 is adapted and adjusted to form a continuous transition between the exposed peripheral side 22 of the chassis 2 and the surface of the workpiece 1 to be deposited. The adjusting base plate 2 corresponds to different shapes of the workpiece to be deposited, and can be set in the shape of a ball table, a truncated cone, a truncated cone, a cylindrical shape or a prismatic shape. In order to make the adjustment chassis 2 and the workpiece 1 to be deposited more accurately, ensure that the exposed peripheral side 22 of the adjustment chassis 2 extends downward along the lower edge of the workpiece 1 to be deposited and presents a continuous surface. A positioning shaft or positioning h...

Embodiment 3

[0035] Such as Figure 7 As shown, the adjusting chassis is composed of a metal ring 4 and a base frame 3 arranged in the metal ring 4; the inner peripheral side 42 of the metal ring 4 matches the outer wall 31 of the base frame 3, and the metal ring 4 The outer peripheral side surface 41 of φ can form a continuous transition with the surface of the workpiece 1 placed thereon to be deposited. In order to make the bottom frame 3 and the metal ring 4 fit more accurately with the workpiece to be deposited, it is ensured that the outer peripheral side 41 of the metal ring 4 extends downward along the lower edge of the surface of the workpiece 1 to be deposited and forms a line. The continuous surface is provided with positioning shafts or positioning holes on the bottom frame 3, Figure 7 Shown in is positioning axis 5. For the workpieces to be deposited with the same size, the bottom frame can be reused. After each deposition on the workpiece, only the metal ring can be replaced...

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Abstract

The present invention provides a film thickness uniformity control method of DLC deposition and an adjustment chassis. The method comprises the following steps: placing the workpiece to be deposited on the adjustment chassis made of metal material and cooperating with the adjustment chassis, and the Forming a continuous transition between the exposed peripheral side of the adjustment chassis and the surface to be deposited of the workpiece; placing the workpiece and the adjustment chassis in a vacuum electric field environment; The DLC film layer is deposited on the peripheral side; the workpiece deposited with the DLC film is removed from the adjustment chassis to complete the DLC film deposition on the workpiece. The present invention changes the electric field at the lower edge of the workpiece to be deposited by lifting the adjustment chassis at the bottom of the workpiece to be deposited, so that the uneven electric field originally distributed on the lower edge becomes uniform, thereby changing the DLC deposited on the entire outer surface of the workpiece The uniformity of the film solves the technical problem of stripping the lower edge of the finished product in the prior art.

Description

Technical field [0001] The invention relates to a DLC (DIAMOND-LIKE CARBON) film preparation technology, in particular to a method for controlling the film thickness uniformity of a DLC deposition film and an adjusting chassis, and belongs to the technical field of DLC film preparation. Background technique [0002] DLC is a substance composed of carbon, similar in nature to diamonds, and at the same time having a structure composed of graphite atoms, so it is also called diamond-like film. DLC is an amorphous film, due to its high hardness and high elastic modulus. The low friction coefficient, wear resistance and good vacuum tribological properties are very suitable as wear-resistant coatings, which has attracted the attention of the optical engineering field. At present, there are many methods for preparing DLC ​​films. Different preparation methods use different carbon sources and ion energies that reach the surface of the substrate. The structure and properties of the deposi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/52C23C16/26C23C16/458
Inventor 付秀华李琳刘冬梅张静
Owner 常州鑫立离子技术有限公司
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