Converging enhancement photo-response superconductivity single photon detector and preparing method thereof

A single-photon detector and photoresponse technology, which is applied in the field of detectors, can solve the problems of limited light receiving area and difficulty in making large-area detectors, and achieve the effects of photoresponse signal enhancement, signal-to-noise ratio improvement, and noise suppression

Active Publication Date: 2013-06-19
SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI +1
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  • Application Information

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Problems solved by technology

[0006] On the other hand, the usual superconducting single photon detectors are composed of a series of extremely narrow nanometer lines with a width of only hundreds of nanometers or even tens of nanometers. It is difficult to make large-area detectors. At present, the relatively mature technology in China can only achieve 10 μm About ×10μm, the light receiving area is very limited
In order to further improve the responsivity of superconducting single photon detectors, we can only seek breakthroughs in the device structure

Method used

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  • Converging enhancement photo-response superconductivity single photon detector and preparing method thereof
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  • Converging enhancement photo-response superconductivity single photon detector and preparing method thereof

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Embodiment 1）

[0044] See figure 1 and figure 2 , the convergence-enhanced photoresponse superconducting single-photon detector structure of this embodiment includes a substrate and a photon coupling cavity combined with it.

[0045] The photon coupling cavity includes a metal reflective layer 4, a transparent medium layer 5, a metal barrier ring 6, and a metal grating layer 7 to form a circular metal-medium-metal (MIM) coupling and converging grating structure.

[0046] The transparent medium isolation layer 3, the metal reflective layer 4, the transparent medium layer 5 and the metal grating layer 7 are sequentially grown on the MgO substrate 1 in order from bottom to top, and each center is aligned; the transparent medium isolation layer 3 is SiO 2 , with a thickness of 100nm; the metal reflective layer 4 is an Ag reflective layer, which is a combination of an Ag ring and an Ag circular structure, and the two are concentric, with a thickness of 300nm; the inner diameter of the light-tra...

Embodiment 2）

[0056] See figure 1 and figure 2 , the convergence-enhanced photoresponse superconducting single-photon detector structure of this embodiment includes a substrate and a photon coupling cavity combined with it.

[0057] The photon coupling cavity includes a metal reflective layer 4, a transparent medium layer 5, a metal barrier ring 6, and a metal grating layer 7 to form a circular metal-medium-metal (MIM) coupling and converging grating structure.

[0058] The transparent medium isolation layer 3, the metal reflective layer 4, the transparent medium layer 5 and the metal grating layer 7 are sequentially grown on the MgO substrate 1 in order from bottom to top, and each center is aligned; the transparent medium isolation layer 3 is SiO 2 , with a thickness of 200nm, the metal reflective layer 4 is an Ag reflective layer, which is a combination of an Ag ring and an Ag circular structure, and the two are concentric, with a thickness of 300nm. The inner diameter of the transpare...

Embodiment 3）

[0068] See figure 1 and figure 2 , the convergence-enhanced photoresponse superconducting single-photon detector structure of this embodiment includes a substrate and a photon coupling cavity combined with it.

[0069] The photon coupling cavity includes a metal reflective layer 4, a transparent medium layer 5, a metal barrier ring 6, and a metal grating layer 7 to form a circular metal-medium-metal (MIM) coupling and converging grating structure.

[0070] The transparent medium isolation layer 3, the metal reflective layer 4, the transparent medium layer 5 and the metal grating layer 7 are sequentially grown on the MgO substrate 1 in order from bottom to top, and each center is aligned; the transparent medium isolation layer 3 is SiO 2 , the thickness is 100nm, and the metal reflective layer 4 is an Ag reflective layer, which is composed of an Ag ring and an Ag circular structure, and the two are concentric, with a thickness of 300nm. The inner diameter of the transparent r...

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Abstract

The invention discloses a converging enhancement photo-response superconductivity single photon detector and a preparing method thereof. The converging enhancement photo-response superconductivity single photon detector comprises a magnesium oxide (MgO) substrate, a superconductivity single photon detector, a transparent medium isolation layer, a metal reflecting layer, a transparent medium layer, a metal barrier layer and a metal grating layer. The superconductivity single photon detector, the transparent medium isolation layer, the metal reflecting layer, the transparent medium layer and the metal grating layer grow on the MgO substrate in sequence from the lower upward. The metal barrier layer is located on the periphery of the transparent medium layer, and connected with the metal reflecting layer and the metal grating layer. The metal grating layer is of a homocentric metal multi-loop structure. The metal reflecting layer is composed of a metal ring and a transparent medium ring, and the metal ring and the transparent medium ring are homocentric. The converging enhancement photo-response superconductivity single photon detector converges incident signal light in a large area scope onto a superconductivity single photon detector photosensitive surface with small area so as to observably improve responses of the superconductivity single photon detector, and can improve the responses by 30 times to the utmost.

Description

technical field [0001] The invention relates to detector technology, in particular to a superconducting single photon detector with converging enhanced light response and a preparation method thereof. Background technique [0002] With the development of detection technology, people's requirements for signal detection sensitivity are gradually increasing. The use of new materials and the advancement of detection methods can detect weak signals covered by noise. In the field of weak signal detection, single photon detection technology is widely used in high-resolution spectral measurement, non-destructive material analysis, high-speed phenomenon detection, precision analysis, atmospheric pollution measurement, bioluminescence, radiation detection, high-energy physics, astronomical photometry, light Time Domain Reflectometry (OTDR), Quantum Key Distribution (QKD) and other fields have a wide range of applications. Single photon detector is one of the most critical devices in ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/101G01J11/00H01L31/18
CPCY02P70/50
Inventor 陆卫王少伟张英李倩陈飞良陈效双
Owner SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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