Sintering machine and method of manufacturing sintered body
A technology for a sintering machine and a sintered body, which is applied in the field of sintering machines and can solve problems such as difficulty in using armored thermocouples, deterioration of compression molds, and unstable temperature measurement.
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no. 1 example )
[0031] figure 1 shows the sectional configuration of the sintering machine according to the first embodiment of the present invention, and figure 2 express figure 1 The top plan configuration of the sintering machine shown. This sintering machine 1 is a uniaxial hot press machine, which includes: a mold 20 for accommodating a processing object 10 (that is, a powder to be sintered); The processing object 10 applies pressure; and the heating part 40 is used to heat the processing object 10 in the mold 20 . The processing object 10 is, for example, powder of a raw material of a sputtering target of a ceramic material, or its calcined material (sintered body).
[0032] The mold 20 has, for example, an insert mold (inner mold) 21 for defining the planar shape of the processed object 10 in a press mold (outer mold) 22 . The die 22 is, for example, a cylindrical member and serves as an isobaric vessel so that the pressure applied by the punch 30 is ...
no. 2 example )
[0089] Figure 9 A sectional configuration of a sintering machine 1A according to a second embodiment of the present invention is shown. When the processing object 10 is accommodated in the mold 20, the sintering machine 1A has the same configuration as the first The same structure, operation and advantageous effect in the embodiment. Therefore, repeated descriptions of the same constituent elements will not be repeated as appropriate.
[0090] As described above, when the processing object 10 is accommodated in the mold 20 , the hole 23 is provided at a position offset from the accommodation position of the processing object 10 in the height direction (z-axis direction) of the mold 20 . In other words, the hole 23 is provided so as to prevent it from being located on the extension line in the diameter direction of the accommodation position of the processing object 10 . This is because the results of the stress simulation show that the stress applied to the insert mold 21 ...
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Abstract
Description
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