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Method and device for detecting defect in matrix

A technology of internal defects and matrix, which is applied in the direction of measuring devices, optical testing flaws/defects, scattering characteristics measurement, etc., can solve the problems of low accuracy rate, inability to effectively distinguish the type of defects, and low resolution, so as to improve the accuracy rate Effect

Inactive Publication Date: 2013-06-26
SAINT-GOBAIN GLASS FRANCE
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Problems solved by technology

[0004] However, the existing automatic optical inspection technology has low resolution, and the correct rate of distinguishing defect types is not high or cannot be effectively distinguished at all

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  • Method and device for detecting defect in matrix
  • Method and device for detecting defect in matrix
  • Method and device for detecting defect in matrix

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Embodiment Construction

[0081] At present, human eyes are usually used to determine whether the defect is located inside or on the surface of the matrix (especially glass). If it is located on the surface, the type of defect can be determined by hand touch; however, the accuracy of this manual detection is low and cannot be distinguished. Type and location of defects within the matrix. In order to solve the above problems, automatic optical inspection (AOI) technology was subsequently developed, which can place a light source under the substrate, set up two image capture devices above the substrate, and obtain the position of the defect by triangulation; but this method also cannot Good for determining the type of defect.

[0082] After research, the inventors found a method for detecting defects in a matrix. The matrix has opposite first and second surfaces, and a plurality of incident points are distributed on the first surface. The detection steps are as follows: figure 1 shown, including:

[00...

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Abstract

The invention relates to a method and a device for detecting defect in a matrix. The detection method for defect in the matrix comprises the following steps: providing a detection light beam and a reference light beam; performing incidence of an incidence point of the detection light beam from a first surface of the matrix to reflection points corresponded to the incidence points one by one on a second surface along an optical detection path, taking collection of back scattering light generated by the detection light beam through each point of the optical detection path as a sample light beam corresponded to the point; respectively collecting the interference signals formed by mutually interfering each sample light beam and with the reference light beam to obtain light intensity information of the back scattering light of each point on the optical detection path, as well as the optical length information between points on the optical detection path; and then determining that whether the optical detection path exists the defects or not according to the light intensity information of the back scattering light of each point on the optical detection path. The detection method can correctly distinguish the defect types in the matrix, so that the correct rate for detecting the defect can be enhanced.

Description

technical field [0001] The invention relates to defect detection technology, in particular to a method and device for detecting defects in a matrix. Background technique [0002] In the existing transparent substrate, especially in the glass production process, various reasons will lead to the occurrence and existence of defects. The main defects include scratches, bubbles and stains, etc. How to automatically identify glass defects is a key issue for glass manufacturers to control the quality of the production process and Product quality inspection is an urgent problem to be solved. [0003] At present, many domestic glass production enterprises still rely on workers to identify defects in glass through eyes, which is very inefficient, but the method of manually detecting defects in glass is prone to errors. In order to solve the above problems, the automatic optical inspection (AOI) technology is used to detect the defects in the glass. Specifically, the detection light (...

Claims

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Application Information

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IPC IPC(8): G01N21/88G01N21/47G01N21/41
CPCG01N21/958
Inventor 林晓峰刘家朋
Owner SAINT-GOBAIN GLASS FRANCE
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