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Magnetic sensor

A magnetic sensor and magnetic induction technology, applied in the field of sensors, can solve the problem of insensitivity of Z-axis magnetic field induction

Active Publication Date: 2013-07-03
IND TECH RES INST
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Problems solved by technology

The main reason is that although the magnetic moment of IMA superparamagnetic is isotropic distribution, it is still an In-Plane characteristic, so the response to the vertical (Z-axis) magnetic field still needs to overcome the demagnetization field to make the magnetic moment perpendicular to the magnetic induction layer. Z-axis magnetic field induction is very insensitive

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Embodiment Construction

[0071] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0072] This case proposes an out-of-plane or perpendicular magnetic tunneling junction (magnetic tunneling junction, hereinafter referred to as MTJ) element and a magnetic sensor using the MTJ element. The structure of the MTJ element includes a fixed magnetic layer, a tunnel layer and a magnetic induction layer stacked together. The film surface of the magnetic sensing layer is made of perpendicular magnetization anisotropy (Perpendicular Magnetic Anisotropy, hereinafter referred to as PMA), and the direction of its easy axis (easy axis) is perpendicular to the magnetic sensing layer, that is, along the direction of the Z axis. The horizontal planes of the magnetic induction layer are generally referred to as X and Y planes. The invention proposes a structure capable of inducing Z-axis geomagnetism. The electronic compass can solve the problems of high man...

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Abstract

A magnetic sensor suitable for sensing an external magnetic field includes a magnetic tunnel junction (MTJ) device. The MTJ device is used to sense an out-of-plane (Z-axis) component of the external magnetic field at a perpendicular direction to the MTJ device. The MTJ device includes a first pinned magnetic layer, a tunnel layer and a magnetic sensing layer. The first pinned magnetic layer has a pinned magnetization perpendicular to the first pinned magnetic layer. The tunnel layer is disposed on the first pinned magnetic layer. The magnetic sensing layer is disposed on the tunnel layer. The magnetic sensing layer has a critical thickness to be at a superparamagnetic range, in which an out-of-plane (Z-axis) magnetic sensitivity is larger than an in-plane (X-axis, Y-axis) magnetic sensitivity. The first pinned magnetic layer, the tunnel layer and the magnetic sensing layer are stacked in a forward sequence or a reverse sequence.

Description

technical field [0001] The present invention relates to an inductor, and in particular to a magnetic inductor. Background technique [0002] Magnetic sensors can be used to sense components of an external magnetic field (such as the earth's magnetism). Magnetic sensors have been widely used in automotive, automation, medical and electronic compass fields, among which the electronic compass needs to be able to sense the three-dimensional component of the external magnetic field. Almost every smartphone these days has an electronic compass. The electronic compass needs to sense the geomagnetism, so it needs to have a three-axis magnetic sensing function, and it must be very sensitive, because the geomagnetism is about 20-60μT. [0003] The magnetic sensor can be designed in various ways, among which the Magnetic Tunneling Junction (MTJ, Magnetic Tunneling Junction) element has been widely used to sense the horizontal component of the external magnetic field. Hereinafter, th...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R33/09G01V3/40
CPCG01R33/098
Inventor 沈桂弘
Owner IND TECH RES INST