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Comb-tooth capacitor accurate assembly method based on bi-stable state compliant mechanism

A technology of flexible mechanism and assembly method, which is applied in the direction of capacitors, capacitor manufacturing, fixed capacitors, etc., and can solve problems such as difficulties in deep reactive ion etching manufacturing processes

Inactive Publication Date: 2013-07-10
NORTH CHINA UNIVERSITY OF TECHNOLOGY +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the interdental gap of comb-tooth capacitors is usually only a few microns, which makes it very difficult to adopt a deep reactive ion etching manufacturing process.

Method used

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  • Comb-tooth capacitor accurate assembly method based on bi-stable state compliant mechanism
  • Comb-tooth capacitor accurate assembly method based on bi-stable state compliant mechanism
  • Comb-tooth capacitor accurate assembly method based on bi-stable state compliant mechanism

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Embodiment Construction

[0014] as attached figure 1 As shown, a comb capacitor precision assembly method based on bistable compliance mechanism is characterized in that the device includes: fixed comb 1, movable comb 2, locking block 3, elastic beam 4, bistable Compliant mechanism 5, support block 6, electrothermal driving electrode 7, micro-actuator 8 of electrothermal compliance mechanism.

[0015] as attached figure 1 And attached figure 2 As shown, are the two static equilibrium configurations of the bistable compliance mechanism 5 before and after the assembly. Since the bistable compliance mechanism 5 has certain stability in its two static equilibrium configurations, when the device works in a vibrating environment, the position of the movable plate will not change, and stable locking can be realized.

[0016] as attached image 3 As shown, the structure of the movable plate position locking block 3 adopts a V-shaped contraction groove structure at the end A, and a thin-walled cantilever ...

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PUM

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Abstract

A comb-tooth-shaped capacitor is a common structural type of a micro-actuator and a micro-sensor of MEMS devices. Gaps between teeth of the comb-tooth-shaped capacitor are only several micrometers, and a gap between a positive plate and a negative plate needs to be fine controlled. The invention provides a comb-tooth capacitor accurate assembly method based on a bi-stable state compliant mechanism. The comb-tooth capacitor accurate assembly method based on the bi-stable state compliant mechanism can improve fine control of the gap between the positive plate and the negative plate of the comb-tooth-shaped capacitor, so that a batch of MEMS devices with the same structure have the same and estimable capacitance, and uniformity of performance of the static MEMS devices at the time of lot manufacturing is improved.

Description

technical field [0001] The invention relates to a comb-tooth capacitor precision assembly method based on a bistable compliant mechanism, and belongs to the technical field of microactuators and microsensors in MEMS devices. Background technique [0002] Comb-tooth capacitors are commonly used microactuators and microsensors in MEMS devices. The gap between the positive and negative plates of the comb-tooth capacitor needs to be precisely controlled, so that MEMS devices with the same structure in batches can have consistent and estimable capacitance values, thereby improving the consistency of performance during batch manufacturing of electrostatic MEMS devices. However, the inter-tooth gap of the comb-shaped capacitor is usually only a few microns, which makes it very difficult to adopt a deep reactive ion etching manufacturing process. Contents of the invention [0003] Aiming at the problem that the gap between the positive and negative plates of a comb-toothed capaci...

Claims

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Application Information

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IPC IPC(8): H01G4/00H01G4/005H01G13/00B81B3/00
Inventor 何广平赵全亮狄杰建袁俊杰孙恺赵雅彬
Owner NORTH CHINA UNIVERSITY OF TECHNOLOGY
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