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Testing device and testing method of TFT (Thin Film Transistor) base plate

A technology for testing devices and testing methods, which is applied to measuring devices, measuring electricity, and measuring electrical variables, etc., can solve the problems of frequent replacement of test frames, avoid storage space and capital occupation, prevent probe damage, and quickly change Effect

Active Publication Date: 2013-08-28
CHENGDU TIANMA MICROELECTRONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] The purpose of the present invention is to provide a test device and a test method for a TFT substrate, which solves the problem of frequent replacement of test frames when using a test device for a TFT substrate, so as to achieve the purpose of rapidly changing test specifications

Method used

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  • Testing device and testing method of TFT (Thin Film Transistor) base plate
  • Testing device and testing method of TFT (Thin Film Transistor) base plate
  • Testing device and testing method of TFT (Thin Film Transistor) base plate

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Embodiment 1

[0073] Such as figure 2 As shown, the TFT substrate testing device 200 of this embodiment includes: a stage 201, a sliding structure 202 arranged on at least one side of the stage 201, a detection unit 203 above the stage 201, and at least one probe. needle unit 204 .

[0074] The sliding structure, the probe unit and the detection unit will be described in detail below in sequence.

[0075] sliding structure

[0076] Such as image 3 As shown, the sliding structure 202 is a sliding guide rail disposed on the side of the platform 201 and parallel to the side. In this embodiment, the sliding structures 202 are respectively arranged on two sides of the platform 201 . It can be understood that, in order to adapt to TFT substrates of more specifications, sliding structures 202 may also be provided on more than two sides or all sides of the carrier 201 . Of course, as long as the test of the TFT substrate to be tested can be completed, the sliding structure 202 can also be pr...

Embodiment 2

[0098] The difference between this embodiment and the first embodiment lies in that the sliding structure 202 is a sliding groove provided on the side of the carrier 201 and parallel to the side. Such as Figure 9 As shown, the sliding structure 202 is respectively arranged on two sides of the carrier 201 . It can be understood that, in order to adapt to TFT substrates of more specifications, sliding structures 202 may also be provided on all sides of the carrier 201 . Of course, as long as the test of the TFT substrate to be tested is completed, the sliding structure 202 can also be provided only on one side of the stage 201 .

Embodiment 3

[0100] Such as figure 2 As shown, in the first embodiment through the sliding structure 202, the probe 205 can be along the length direction of the sliding structure 202 ( figure 2 in the Y-axis direction) freely slides, but cannot slide along the width direction of the sliding structure 202 ( figure 2 If the signal access point of the TFT substrate changes in the width direction of the sliding structure 202, the test device for the TFT substrate mentioned above cannot be used for testing. For this reason, in this embodiment, the section of the sliding member 206 is designed as a rectangle to ensure that the probe 205 can also have a certain range of movement along the width direction of the sliding structure 202 (direction perpendicular to the length direction).

[0101] Such as Figure 10 As shown, by controlling the embedding length of the sliding component 206 in the sliding structure 202 , the sliding component 206 can move in a small range along the width direction ...

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Abstract

The invention discloses a testing device and a testing method of a TFT (Thin Film Transistor) base plate. The testing device comprises a microscope stage, a detection unit and at least one probe unit, wherein a sliding structure is arranged on at least one side of the microscope stage; the detection unit is positioned above the microscope stage; the probe unit comprises at least one probe and a sliding component; and the probe unit slides along the sliding structure along with the sliding component. By adopting the testing device of the TFT base plate, the testing specification can be quickly changed, additionally, the reserve of a testing framework is reduced, and occupation of space and funds for reserving the testing framework is avoided.

Description

technical field [0001] The invention relates to flat panel display technology, in particular to a testing device and a testing method of a TFT substrate. Background technique [0002] After the TFT substrate is manufactured, it is necessary to use a testing device to test the TFT substrate to confirm whether it can work normally. Since the newly fabricated TFT substrate has not yet been bonded to the CF substrate, there is no liquid crystal element on the TFT substrate, and of course no signal connector is provided. Therefore, it is necessary to input a test signal to the TFT substrate through the probes of the test device, and the detection unit simulates the CF substrate and the liquid crystal element to detect the TFT substrate. [0003] figure 1 It is a schematic diagram of an existing TFT substrate testing device. Such as figure 1 As shown, the existing TFT substrate testing device 100 includes: a stage 101 , a detection unit 102 located above the stage 101 , and a ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/13G01R31/00
Inventor 程悦田钟赵彪
Owner CHENGDU TIANMA MICROELECTRONICS
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