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Apparatus for removing harmful gases by combustion

A harmful gas, deflecting device technology, applied in the direction of burners, combustion methods, combustion types, etc., can solve the problems of interruption of the combustion process, the continuous operation of the flame root repeatedly extinguishing obstacles, and the need to be restarted.

Active Publication Date: 2016-05-04
DAS ENVIRONMENTAL EXPERT
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] The problem sometimes arises in the devices mentioned here for the conversion of harmful gases that the autonomous continuous operation is hindered by repeated extinguishing of the flame root, i.e. the combustion process initiated by the ignition source is always interrupted again and must be restarted

Method used

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  • Apparatus for removing harmful gases by combustion
  • Apparatus for removing harmful gases by combustion

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Embodiment Construction

[0042] figure 1 and figure 2 An exemplary embodiment of a device 1 according to the invention for removing harmful gases, which are produced, for example, during the production of semiconductor materials, is shown. Hazardous gases of this type mainly include hydrogen and ammonia as process gases and other gases, especially metal-organic compounds that are incorporated into the process gas in smaller quantities. Furthermore, the process gas can additionally be mixed with nitrogen.

[0043] According to the invention, the conversion of the noxious gases into reaction gases which are subsequently combusted with air supply takes place by thermal cracking, wherein the heat generated during the combustion of the reaction gases is advantageously used for pyrolytic cracking of the noxious gases.

[0044] According to the invention, the device 1 has a heatable pyrolysis tube 2 through which harmful gases flow for thermal cracking. If harmful gases such as ammonia (NH 3 ), then the...

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Abstract

The invention relates to a device (1) for removing by combustion harmful gases, especially those containing ammonia, which arise, for example, during the production of semiconductor materials, the device having a heatable pyrolysis tube (2), the harmful gases flow through said pyrolysis tubes for thermal cracking into reaction gases; ignition means (4) downstream of the outlet (3) of said pyrolysis tubes (2); and for said reaction gases in a reaction zone (6) Combustion air supply device (5) in. According to the setting of the present invention, with respect to the flow direction (a) of the harmful gas in the pyrolysis tube (2), a deflection device ( 7) For deflecting and swirling the reaction gas together with the supplied air.

Description

technical field [0001] The invention relates to a device for removing harmful gases by combustion, said device having: a heatable pyrolysis tube through which harmful gases flow for thermal cracking into reaction gases; an ignition downstream of the outlet of the pyrolysis tube means; and air supply means for the combustion of the reaction gas in the reaction zone. Background technique [0002] Hazardous gases in the sense mentioned here are particularly poisonous or other reactive gases which are also produced during the production of semiconductor materials, for example in the production of LEDs, and contain ammonia (NH 3 ), hydrogen (H 2 ) and sometimes nitrogen (N 2 ). This type of hazardous gas can be handled in different ways. One possibility for treating and converting reactive harmful gases is to oxidize or reduce these harmful gases by means of suitable oxidizing and reducing agents. Furthermore, those gases can be pyrolytically cracked thermally for subsequent...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F23G7/06
CPCF23C7/004F23C2900/03006F23G5/32F23G7/066F23D14/00F23D14/46F23G7/06
Inventor H·赖夏特A·弗伦策尔M·弗尔斯特C·克洛斯S·特雷普特R·维森贝格W·维森贝格G·戴维斯
Owner DAS ENVIRONMENTAL EXPERT
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