Thinned micro-electromechanical microphone module
A micro-electromechanical microphone, thin technology, applied in the direction of electrical components, transducer circuits, sensors, etc., can solve problems such as considerable difficulty
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[0011] In order to illustrate the structure, features and effects of the present invention in detail, the following will be further described in detail in conjunction with specific embodiments and accompanying drawings.
[0012] image 3 Shown is the thin micro-electro-mechanical microphone module 20 provided by this embodiment, including a first circuit board 30, a micro-electro-mechanical chip 40, an application-specific chip 50 (Application-specific integrated circuit, ASIC), and a first Two circuit boards 60 .
[0013] A first groove 31 and a second groove 32 spaced apart from each other are recessed from the top surface of the first circuit board 30 , and a first signal layer 33 and a first ground layer 34 are buried inside.
[0014] The MEMS chip 40 is accommodated in the first groove 31 of the first circuit board 30 and attached to the bottom wall of the first groove 31 .
[0015] The second circuit board 60 covers the top surface of the first circuit board 30 and use...
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