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GMR-MEMS integrated weak magnetic sensor adopting plane micro-coil

A technology of weak magnetic sensor and planar coil, which is applied in the field of weak signal sensing, can solve the problems of restricting the accuracy of the sensor, and achieve the effects of simple structure, convenient manufacture, and improved measurement resolution

Active Publication Date: 2015-07-15
NAT UNIV OF DEFENSE TECH
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Problems solved by technology

The existence of hysteresis restricts the improvement of sensor accuracy

Method used

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  • GMR-MEMS integrated weak magnetic sensor adopting plane micro-coil
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  • GMR-MEMS integrated weak magnetic sensor adopting plane micro-coil

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Embodiment Construction

[0021] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0022] Such as figure 1 As shown, the GMR-MEMS integrated magnetic field weakening sensor using a planar microcoil of the present invention includes an insulating substrate 14, a gasket 15, a micro piezoelectric bridge, a piezoelectric sheet 3, a GMR sensitive element 5, a planar coil 6, and three sets of electrodes As well as the modulation film 10; the insulating substrate 14 can be made of surface-polished insulating material as required. Three pairs of electrodes are plated on the surface of the insulating substrate 14, and the three groups of electrodes are respectively the piezoelectric sheet driving electrodes 7 (including the first piezoelectric sheet driving electrodes 701 and the second piezoelectric sheet driving electrodes 702 ), the planar coil excitation electrodes 8 ( Including the first planar coil excitation electrod...

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Abstract

Provided is a GMR-MEMS integrated weak magnetic sensor adopting a plane micro-coil. The base of a micropressure bridge comprises a first base and a second base, the base is fixedly arranged on a spacer, the spacer is fixedly arranged on an insulating substrate, and a bridge body is connected between the first base and the second base. A piezoelectric patch is arranged on the bridge body and between the first base and the second base. A GMR sensitive element is arranged below the bridge body and is symmetrically arranged, magnetic force line collector in the GMR sensitive element comprises a first magnetic force line collector and a second magnetic force line collector, clearance is reserved between the first magnetic force line collector and the second magnetic force line collector, GMR resistors comprises a first GMR resistor, a second GMR resistor, a third GMR resistor and a fourth GMR resistor, the first GMR resistor, the second GMR resistor, the third GMR resistor and the fourth GMR resistor form a Wheatstone bridge, the first GMR resistor is located in the first magnetic force line collector, the second GMR resistor is located in the second magnetic force line collector, and the third GMR resistor and the fourth GMR resistor are located in the clearance. A modulation film is connected on a position, opposite to the modulation film, on the bridge body. The GMR-MEMS integrated weak magnetic sensor adopting the plane micro-coil has the advantages of being simple in structure, low in noise, low in cost, low in hysteresis and the like.

Description

technical field [0001] The invention mainly relates to the technical field of weak signal sensing, in particular to a GMR-MEMS integrated weak magnetic sensor using planar micro-coils suitable for measuring weak magnetic fields. Background technique [0002] Weak magnetic field measurement is widely used in geomagnetic navigation, target detection, geological exploration, biomedicine and other fields. At present, there are many types of sensors used for weak magnetic field measurement, mainly including fluxgate sensors, optical pump magnetic sensors, proton magnetic sensors, superconducting quantum interference magnetic sensors, optical fiber magnetic sensors, giant magnetoresistance magnetic sensors, giant magnetic Resistive (Giant Magnetoresistive, GMR) magnetic sensors, etc., among which GMR magnetic sensors are made based on microelectronics technology. Compared with other types of magnetic sensors, they obviously have the characteristics of small size, low power consump...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R33/09
Inventor 田武刚赵建强李文印胡佳飞潘孟春
Owner NAT UNIV OF DEFENSE TECH
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