Swing arm type contourgraph measuring head alignment calibration device with rotating sensor

Abstract

A swing arm type contourgraph measuring head alignment calibration device with a rotating sensor comprises a contourgraph measuring head, a contourgraph measuring head fine adjustment mechanism, a transverse arm, a stand column, a balance weight, a transverse arm rotary table, a workpiece rotary table and an optical measuring head, wherein the optical measuring head is fixed on the workpiece rotary table and carries out rotating motion around the contourgraph measuring head, outer contour data of the contourgraph measuring head are obtained, central position information of the contourgraph measuring head is calculated through a data processing algorithm, and alignment adjustment of the contourgraph measuring head and the workpiece rotary table is achieved through the adjustment of the contourgraph measuring head fine adjustment mechanism. According to the swing arm type contourgraph measuring head alignment calibration device, the alignment adjustment of the contourgraph measuring head and the workpiece rotary table is achieved, and a practical solution is provided for inplace measurement of a swing arm type contourgraph on an optical processing site.

Description

technical field [0001] The invention relates to a centering calibration device for a sensor-rotating swing-arm profiler probe, which belongs to the technical field of optical detection and is suitable for centering calibration between a swing-arm profiler probe and a workpiece turntable. Background technique [0002] The swing arm profiler is an effective in-situ detection instrument for the optical mirror processing process. Its biggest advantage is that it can be directly installed next to the optical mirror processing machine tool, and the turntable of the optical mirror processing machine tool can be used as the swing arm profiler. The turntable is used for in-situ detection of the mirror surface under test. While this method is convenient, it also brings another problem: how to ensure that the center of the swing arm profiler probe passes the rotation center of the workpiece turntable during the detection process? If the probe center of the swing-arm profiler does not ...

AI Technical Summary

Problems solved by technology

While this method is convenient, it also brings another problem: how to ensure that the center of the swing arm profiler probe passes the rotation center of the workpiece turntable during the detection process? If the probe center of the swing-arm profiler does not pass through the rotation center of the workpiece turntable, the coordinate system of the swing-arm profiler will not be established, and the measurement results of the swing-arm profiler will not reflect the actual surface shape error of the measured mirror surface

At present, there is no effective centering method for the center of the swing arm profiler probe to pass through the rotation center of the workpiece turntable

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