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Gas lock, and coating apparatus comprising a gas lock

一种气闸、气体的技术，应用在分离两个气室的气闸领域，能够解决设备低运行时间、不具有指导性、高纯产品无法产生气体分离等问题，达到降低设备成本的效果

Active Publication Date: 2013-10-23
FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG EV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The problem here, however, is that it is not instructive in its current usual form and does not produce sufficiently admissible and economical gas separations for high-purity products
This leads to problems a), b) and c) above, and to low runtime of the device

Method used

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  • Gas lock, and coating apparatus comprising a gas lock
  • Gas lock, and coating apparatus comprising a gas lock
  • Gas lock, and coating apparatus comprising a gas lock

Examples

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Embodiment Construction

[0044] exist figure 1 A gas lock known from the prior art is shown in . In this case, the airlock I serves to separate two gas chambers G1 and G2 and is thus arranged between them. The air lock I comprises an inflow body K with an inlet channel H arranged centrally in the inflow body K. Opposite the inflow body K is arranged a wall designed as a plate A, so that a gap B is formed between the plate A and the inflow body K. I1 and i2 designate corresponding outflow holes, which are located at the outlet of the air lock I to the gas chambers G1 and G2. The inert / non-hazardous gas i1 or i2 flows oppositely through the gas chamber G1 or G2. Let P1 and P2 denote the corresponding gas pressures in the corresponding gas chambers G1 and G2, respectively. P3 is the pressure of the inert gas within the input line of the lock gas. The higher P3 relative to P1 or P2, the more effectively the airlock acts. As also already indicated in the figure, the gas lock is operated in such a way...

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Abstract

The present invention relates to a gas lock for separating two gas chambers, which while taking up minimal space makes it possible to achieve the separation of gases without contact with the product / educt / transporting system. The gas lock according to the invention is distinguished in that at least one means for manipulation of the flow is present in a flow passage of the gas lock. Also, the present invention relates to a coating device which comprises a gas lock according to the invention. Also provided are possibilities for using the gas lock according to the invention.

Description

technical field [0001] The invention relates to a gas lock for separating two gas chambers, which enables a gas separation with minimal space consumption and without contact with the product / educt / conveying system. The air lock according to the invention is characterized in that at least one means for manipulating the flow is present in the flow channel of the air lock. The invention likewise relates to a coating device comprising an air lock according to the invention. Furthermore, the use possibilities of the air lock according to the invention are given. Background technique [0002] In order to reduce costs, it is attempted to design coating plants in such a way that educt and product streams are produced continuously. However, the separation of process gases in plants and the separation of ambient and process gases is problematic in most fields. [0003] The following difficulties mainly arise in continuous installations in which conventional sealing methods have to ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/52C23C16/54C23C16/455
CPCC23C16/45506C23C16/52F16J15/14C23C14/56C23C16/54C23C16/45589C23C16/45591Y10T137/0318Y10T137/2224
Inventor 戴维·波卡扎斯蒂芬·雷伯马丁·阿诺德诺伯特·希林格
Owner FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG EV
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