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A kind of SIC micro-powder synthesis furnace and furnace gas collection method thereof

A synthesis furnace and micropowder technology, applied in the direction of climate sustainability, sustainable manufacturing/processing, carbide, etc., can solve the problems of non-recycling of CO gas, low added value of products, low product quality, etc., and achieve obvious energy saving effect, Ease of fine control and highly automated effects

Inactive Publication Date: 2016-01-06
张兴材
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This type of furnace has a low level of technology, backward production methods, serious pollution, low thermal efficiency, high energy consumption, unsafe production (easy to spray furnace), low product quality, low added value of products, and no recovery of CO gas, which is different from the current national Energy saving and emission reduction policies are greatly contrary. In recent years, countries have tried to change this SiC production method with high energy consumption, high pollution and low output, such as large-scale production furnaces, changing the power supply method of electrodes, and CO gas collection and reuse. Certain energy-saving effect, but did not fundamentally change its backward status
[0004] However, the above methods do not consider the synthesis of silicon carbide under vacuum conditions. The current industrial production of SiC furnaces are all open furnaces, and the synthesis temperature cannot be accurately measured. , Furnace body size, and product quality to determine the power supply system, which has caused a certain degree of randomness in production. The entire production process is extensive, and the furnace gas cannot be collected, resulting in unstable product quality and high energy consumption. Every time the market Volatility has caused certain difficulties for enterprises

Method used

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  • A kind of SIC micro-powder synthesis furnace and furnace gas collection method thereof
  • A kind of SIC micro-powder synthesis furnace and furnace gas collection method thereof

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] Such as figure 1 As shown, this embodiment includes a main furnace body wrapped by a steel shell 1 and a synthetic cavity inside, the main furnace body is connected to an automatic control and detection system, and an upper flange cover 2 and a lower flange cover are arranged on the outer shell of the main furnace body 3. The main furnace body is provided with a steel shell 1, an insulation layer 4 and a refractory layer 5 in sequence from the outside to the inside. The main furnace body is provided with a correspondingly arranged graphite electrode 6 and a thermocouple 7 installed at the bottom. The lower flange of the main furnace body Two electrode holes are arranged on the cover 3, and a water-cooled electrode 8 connected to the graphite electrode 6 is installed on the two electrode holes, and a vacuum pipeline 10 connected to the vacuum system 9 is arranged on the top of the upper flange cover 2; the water-cooled electrode 8 and the The power supply busbars 11 are ...

Embodiment 2

[0034] Embodiment 2: SiC synthesis and gas collection method

[0035] Including the following steps:

[0036] (1) SiC synthesis raw materials are mixed according to the ratio and loaded into the SiC synthesis cavity of the main furnace body;

[0037] (2) The main furnace body is sealed;

[0038] (3) Turn on the slide valve pump and Roots pump in sequence;

[0039](4) When the vacuum degree reaches below 100Pa, start the thermocouple power supply in the main furnace body, and turn on the cooling water system at the same time;

[0040] (5) SiC is generated in the SiC synthesis chamber, and CO-based gas is produced at the same time. These gases are first pumped into the vacuum pump, and then non-gas components such as coal tar are removed through the gas filter, and finally collected into the gas collection chamber.

[0041] (6) After the power supply in the main furnace is completed, turn off the power supply, and the vacuum pump will be turned off 10 minutes after the power ...

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Abstract

The invention relates to the technical field of solid-phase synthesis of silicon carbide micro powder, in particular to a SiC micro powder synthetic furnace and a furnace gas collecting method thereof. The SiC micro powder synthetic furnace comprises a main furnace body wrapped by a steel shell and internally provided with a synthetic cavity. The main furnace body is connected with an automatic control and detecting system, and an upper flange cover and a lower flange cover are arranged on a main furnace body casing. The SiC micro powder synthetic furnace is characterized in that graphite electrodes arranged correspondingly and thermocouples arranged at the bottom are arranged in the main furnace body, two electrode holes are formed in the lower flange cover of the main furnace body, water-cooling electrodes connected with the graphite electrodes are arranged on the two electrode holes, and a vacuum pipeline connected with a vacuum system is arranged on the upper portion of the upper flange cover. The SiC micro powder synthetic furnace is compact in structure, high in automation, environmentally friendly, obvious in energy-saving effect, high in yield, low in cost of SiC per ton, capable of collecting CO gas safely and stably and suitable for wide popularization and application.

Description

(1) Technical field [0001] The invention relates to the technical field of solid-phase synthesis of silicon carbide micropowder, in particular to a SiC micropowder synthesis furnace and a furnace gas collection method thereof. (2) Background technology [0002] SiC micropowder has a very broad market demand in the production fields of optical instruments, electronic devices, ultra-precision grinding and metal product finishing, advanced refractory materials, and structural ceramic materials. At present, there are three methods for the synthesis of SiC micropowder: solid-phase method, liquid-phase method and gas-phase method. Solid-phase methods include Acheson method, ESK method, shaft furnace method and high-temperature converter method, multi-core furnace method, carbon-silicon direct reaction method and self-propagating method, etc.; liquid-phase method has been developed since the 1980s. There are many kinds of liquid phase methods, among which there are mainly precipit...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B31/36C01B32/956
CPCY02P20/10
Inventor 张兴材
Owner 张兴材