Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Production method of electronic-grade sulphuric acid

A sulfuric acid production, electronic-grade technology, applied in chemical instruments and methods, sulfur compounds, inorganic chemistry, etc., can solve the problems that sulfuric acid is difficult to reach electronic-grade standards and high energy consumption

Active Publication Date: 2015-06-17
SHANGHAI ZHENGFAN TECH +1
View PDF3 Cites 2 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the high boiling point of sulfuric acid, the boiling point of 98% sulfuric acid at normal pressure is 338°C, so electric heating wires must be used to heat and distill the sulfuric acid solution in a quartz glass container. Operating at such a high temperature not only consumes high energy, but also It also brings certain safety risks. In addition, due to the strong corrosiveness of concentrated sulfuric acid, the sulfuric acid distilled at high temperature will dissolve some impurities in the glass equipment, making it difficult for the sulfuric acid produced by this method to meet the requirements of integrated circuits. electronic grade standard

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Production method of electronic-grade sulphuric acid

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0038] See figure 1 The implementation steps of Example 1 are as follows:

[0039] 1): Provide industrial grade sulfur trioxide raw materials into the raw material storage tank;

[0040] 2): Transport the above-mentioned sulfur trioxide raw materials into the evaporation tank with a centrifugal pump;

[0041] 3): Use hot water to heat the evaporation tank, the heating temperature is controlled at 60°C, and the sulfur trioxide vapor generated by heating enters the absorption tower 2 after passing through the first filter 1;

[0042] 4): Use electronic grade ultrapure water to absorb sulfur trioxide vapor in the adsorption tower 2, and adjust the concentration of the absorption solution to 97% ± 0.5% by controlling the flow of sulfur trioxide vapor and the flow of ultrapure water. The temperature of 2 is controlled at 100°C, the absorbed solution is cooled by the first cooler 4 and then enters the degassing tower 7, and the outlet temperature of the first cooler 4 is controlled at 50°C...

Embodiment 2

[0048] See figure 1 , The implementation steps of Example 2 are as follows:

[0049] 1): Provide industrial grade sulfur trioxide raw materials into the raw material storage tank;

[0050] 2): Press the above-mentioned sulfur trioxide raw material into the evaporation tank with nitrogen;

[0051] 3): Use steam to heat the evaporation tank, the heating temperature is controlled at 70°C, and the sulfur trioxide steam produced by heating enters the absorption tower 2 after passing through the first filter 1;

[0052] 4): Use electronic grade ultrapure water to absorb sulfur trioxide vapor in the adsorption tower 2, and adjust the concentration of the absorption solution to 97% ± 0.5% by controlling the flow of sulfur trioxide vapor and the flow of ultrapure water. The temperature of 2 is controlled at 95°C, the absorbed solution is cooled by the first cooler 4 and then enters the degassing tower 7, and the outlet temperature of the first cooler 4 is controlled at 45°C;

[0053] 5): The d...

Embodiment 3

[0058] See figure 1 The implementation steps of Example 3 are as follows:

[0059] 1): Provide industrial grade sulfur trioxide raw materials into the raw material storage tank;

[0060] 2): Transport the above-mentioned sulfur trioxide raw materials into the evaporation tank with a centrifugal pump;

[0061] 3): Electric heating wire is used to heat the evaporation tank, and the heating temperature is controlled at 50°C. The sulfur trioxide vapor generated by heating enters the absorption tower 2 after passing through the first filter 1;

[0062] 4): Use electronic grade ultrapure water to absorb sulfur trioxide vapor in the adsorption tower 2, and adjust the concentration of the absorption solution to 97% ± 0.5% by controlling the flow of sulfur trioxide vapor and the flow of ultrapure water. The temperature of 2 is controlled at 85°C, the absorbed solution is cooled by the first cooler 4 and then enters the degassing tower 7, and the outlet temperature of the first cooler 4 is con...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
electrical resistivityaaaaaaaaaa
Login to View More

Abstract

The invention discloses a production method of electronic-grade sulphuric acid. The production method comprises the following steps in sequence: industrial-grade sulfur trioxide raw materials are provided and placed into a raw material storage tank; the sulfur trioxide raw materials are conveyed into an evaporator tank; the evaporator tank is heated; sulfur trioxide steam generated by heating enters into an absorption tower through a filter; the sulfur trioxide steam is absorbed by electronic-grade ultrapure water in the absorption tower, the concentration of absorption liquid is controlled, and the absorbed solution enters into a degassing tower after cooled by a cooler; air stripping is performed on a sulfuric acid solution by the degassing tower through compressed air; the sulfuric acid solution enters into a finished product storage tank after cooled; finally, the final electronic-grade sulphuric acid applied to the integrated circuit industry is obtained after ultrafiltration to remove particles. The operating temperature of the technology, compared with a conventional technology, is lower than 120 DEG C. Therefore, the technology is safer than a high-temperature distillation technology which takes industrial-grade sulfuric acid as raw material, and in addition, compared with adopting equipment made of quartz glass, non-pollution to electronic-grade sulphuric acid products is guaranteed from equipment material.

Description

Technical field [0001] The invention relates to a method for producing sulfuric acid, in particular to a method for producing electronic grade sulfuric acid required for the production of large-scale integrated circuits. Background technique [0002] Sulfuric acid, chemical formula is H 2 SO 4 , With a relative molecular mass of 98.08, is a colorless, odorless, oily liquid, a strong acid with a high boiling point and difficult to volatile, easily soluble in water, and miscible with water in any ratio. Sulfuric acid is one of the important products in the basic chemical industry. It is not only used as a raw material for many chemical products, but also widely used in other sectors of the national economy. [0003] Electronic grade sulfuric acid is currently widely used in integrated circuit manufacturing processes for resist stripping. The most commonly used sulfuric acid has a concentration of about 96%. Organic pollutants remaining on the substrate and related equipment will ha...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): C01B17/74
Inventor 汤剑波
Owner SHANGHAI ZHENGFAN TECH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com