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A method and device for measuring spot size

A technology of spot size and light-passing hole, applied in the field of laser measurement, can solve the problems such as the inability of laser imaging, insufficient test accuracy, complicated optical path adjustment, etc., and achieve the effect of low cost, favorable promotion and simplified test method.

Active Publication Date: 2016-06-29
11TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

But there are also many disadvantages: First, as a photoelectric conversion device, CCD has a certain corresponding wavelength, and it cannot be imaged and tested for lasers other than the corresponding wavelength, and it may be necessary to equip multiple CCD detectors; and a set of CCD-based The beam quality testing system is expensive, and many research institutes do not have the ability to equip it
However, the knife-edge method also has obvious disadvantages, that is, the adjustment of the optical path is more complicated, which leads to insufficient test accuracy.

Method used

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  • A method and device for measuring spot size
  • A method and device for measuring spot size
  • A method and device for measuring spot size

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no. 1 example

[0036] In the first embodiment of the present invention, a device for measuring the spot size, the laser beam to be measured is emitted by the laser to be measured, such as Figure 1~3 As shown, the device includes: a guide rail 1, a guide rail adjustment frame 2, a blade 3, a blade adjustment frame 4, a first light hole support 5, a second light hole support 6 and a laser power meter 7, the laser to be measured and the laser power Meters 7 are respectively located on the outside of the two light hole brackets, wherein,

[0037] Both ends of the guide rail 1 are respectively provided with a first light hole bracket 5 and a second light hole bracket 6, and the line between the corresponding light holes on the two light hole brackets is parallel to the axis of the guide rail 1; Such as figure 1 As shown, five light holes are provided on the first light hole bracket 5 and the second light hole bracket 6, and the corresponding two light holes have the same size, but each light ho...

no. 2 example

[0045] In the second embodiment of the present invention, a method for measuring the spot size using the device described in the first embodiment, such as Figure 4 As shown, the method includes the following specific steps:

[0046] Step S101, passing the laser beam emitted by the laser to be tested through the light hole on the light hole bracket at one end of the guide rail;

[0047] Step S102, adjust the position of the guide rail through the guide rail adjustment frame, so that the laser beam can pass through the corresponding light hole on the light hole bracket at the other end of the guide rail and enter the laser power meter, record the degree at this time as P ;

[0048] Step S103, adjust the moving position of the knife edge on the blade through the blade adjustment frame in the plane where the blade is located, so that the knife edge can block the laser beam passing through the corresponding light hole, and change the degree of the laser power meter; the present i...

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Abstract

The invention discloses a method and device for measuring the spot size. The device for measuring the spot size comprises a guide rail, a guide rail adjusting frame, a blade, a blade adjusting fame, two light through hole supports and a laser power meter. A laser to be measured and the laser power meter are located outside the two light through hole supports respectively. The two ends of the guide rail are respectively provided with one light through hole support. The connection line between corresponding light through holes formed in the two light through hole supports is parallel to the axis of the guide rail. The blade adjusting frame is fixed between the two light through hole supports arranged on the guide rail. The blade is installed on the blade adjusting frame. The blade edge moving position of the blade is adjusted by the blade adjusting frame within the plane of the blade so that a blade edge can shield laser beams to be measured and penetrating through the corresponding light through holes to different degrees. The position of the guide rail arranged on the guide rail adjusting frame is adjusted by the guide rail adjusting frame. The plane where the blade exists is perpendicular to the axis of the guide rail. The method and device for measuring the spot size simplify adjustment of a light path when the spot size is measured, and improve the measurement precision.

Description

technical field [0001] The invention relates to the technical field of laser measurement, in particular to a method and device for measuring the size of a light spot. Background technique [0002] The spot size or diameter is an important parameter to measure the output characteristics of the laser beam. [0003] With the in-depth study of lasers, the focus of attention has shifted from simply pursuing the improvement of output laser power to how to obtain laser beams with higher brightness or power density. Beam quality, as an important indicator for evaluating laser brightness, has also gained the attention of researchers. Although there are many measurement methods for beam quality, in the final analysis, they are all calculated by measuring the laser spot size at one or more places along the laser transmission direction. [0004] After the laser outputs a beam of laser light, its transmission characteristics determine that it cannot be directly applied. Generally, a s...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/00G01N21/63
Inventor 朱辰吕华昌张大勇张昆王雄飞张浩彬
Owner 11TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP