Self-powered monolithic integration digital sensor for detection of light source direction
A digital sensor, monolithic integration technology, applied in the field of optical sensors, can solve the problem of not seeing complete self-power supply, and achieve the effect of easy design and production, low cost per piece, and low cost
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[0037] The present invention will be further described in detail below in conjunction with specific embodiments, which are explanations of the present invention rather than limitations.
[0038] The self-powered single-chip integrated digital sensor for light source direction detection provided by the present invention includes a light sensing unit module and a light direction angle detection module, and the IC plane manufacturing technology that can be used includes CMOS technology, BICMOS technology, bipolar technology, etc. The integrated circuit technology will be described in detail below in conjunction with the CMOS technology.
[0039] The photosensitive unit module includes photosensitive units arranged in an array on a P-type substrate; each photosensitive unit includes a blocking wall and two or more photodiodes symmetrically arranged on both sides thereof; the described The photodiode is a PN junction photodiode composed of an N well on a P-type substrate and a P+ d...
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