Buckling micro-force sensor and micro-force measuring method based on twin beams or serial connection twin beams

Abstract

The invention discloses a buckling micro-force sensor and a micro-force measuring method based on twin beams or serial connection twin beams, and belongs to the fields of micro-nanomechanics and precise measurement. A group of symmetrical slim beams or two groups of serial connection slim beams are adopted in the sensor, the slim beams are arranged in a parallel mode, one end of each slim beam is fixed, the deformation of the slim beams is limited through limiting ends, a load is applied through a probe and a capacitor, and the displacement is measured. In the process of using, the twin beams are bent to be instable in the axis in advance, and the buckling mode of the twin beams is kept. By appropriately leading in the transverse displacement of the twin beams, the obvious transverse displacement change of the twin beams can be obtained under the very small axial force within a certain load range, and the value of the measured micro-force is obtained through load calculation based on the buckling instability formula or directly obtained through the changes of the displacement via the early calibration. The buckling micro-force sensor is simple in structure and in sensitivity, sequence sensors in different measuring ranges can be formed, and therefore the micro-force measuring method and the sensor design both of which have a wide range of loads and high sensitivity can be provided for the measurement of the micro-nanomechanics.

Description

technical field [0001] The invention belongs to the field of micro-nano mechanics and precision measurement, and in particular relates to a buckling micro-force sensor and a micro-force measurement method based on double beams or double beams in series, which are suitable for macro-micro mechanical measurement. Background technique [0002] Force detection and loading has always been one of the most basic and important issues in mechanical measurement. With the development of micro-nano technology, materials and structures of micron or even nano scale have been widely used, and the interaction force between these structures has also been reduced from the Newton level to the nano-newton or even pico-Newton level. Therefore, when the characteristic scale of the detection material or structure is reduced to the millimeter or even nanometer level, in order to accurately measure the mechanical properties of the micro-scale material and structure, there are two important problems ...

AI Technical Summary

Problems solved by technology

Due to these two limitations, the traditional loading unit and force measuring unit are difficult to continue to use in micro-nano-scale experiments, and new methods of measuring micro-force and force-sensing mechanisms must be studied to realize the loading and measurement of micro-force

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