Electric property detection method and electric property detection apparatus

Abstract

The invention provides an electric property detection method and an electric property detection apparatus which can fully inhibit the influence of the third electronic component in first-third electronic components disposed in a detection object substrate and forming a triangular circuit and can detect the electric property of the first electronic component and the second electronic component accurately. A second contact and a third contact are selected as a first selection contact and a second selection contact from a plurality of second contacts (7a-7d) and third contacts (8a-8d) disposed on the surface of the detection objection substrate (1) in such a manner that the resistance value of a wiring path (10) between the second contact and a first connecting part (5a) of the third electronic component (such as an impedance element (5)) and the resistance value of a wiring path (11) between the third contact and a second connecting part (5b) of the third electronic component form a combination of most proximate values. The electric property of the first and second electronic components (such as capacitors (3, 4)) is detected through first contacts (6a, 6b), the first selection contact and the second selection contact.

Description

technical field [0001] The present invention relates to an electrical characteristic detection method and a detection device for detecting the electrical characteristics of two electronic components among three electronic components constituting a triangular circuit embedded in a substrate to be tested. Background technique [0002] In recent years, with the rapid development of substrate manufacturing technology, the development of built-in substrates (embedded substrates) in which electronic components such as capacitors and coils are embedded in multilayer substrates has also been promoted. In such a miniaturized and complicated substrate, only contact points formed on the substrate can be electrically connected to external devices, so it is difficult to perform inspections for checking electrical characteristics of built-in electronic components. [0003] In addition, when a delta circuit in which three electronic components, the first to third electronic components, are...

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Problems solved by technology

[0004] However, even if the voltage levels of the two contact points on the surface of the substrate connected to the connection portions on both sides of the third electronic component are set to the same level, in many cases, these respective contact points are not connected to both sides of the third electronic component. The resistance value of the wiring path between the connection parts is different

Therefore, the voltage levels of the connection parts on both sides of the third electronic component are different, and the influence of the third electronic component cannot be eliminated, and there is a problem that the electrical characteristics of the first and second electronic components cannot be accurately detected.

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