Dynamic calibration device for small-size pressure sensor

Abstract

The invention belongs to the technical field of metering test and relates to a dynamic calibration device for a small-size pressure sensor. The dynamic calibration device consists of a dynamic pressure generator, a coordinated control system, a hydraulic system and a temperature chamber, wherein the hydraulic system provides a pressure source for the device; the dynamic pressure generator is used for changing the area of an oil outlet of the dynamic pressure generator by controlling the rotating speed of a self pressure adjusting plate, so that the frequency modulation pressure with periodical change is formed in a cavity; the temperature chamber is used for setting all temperature environments of the calibrated pressure sensor during work and calibrating the temperature drifts under different pressure conditions; the dynamic pressure generator is used for transmitting the frequency modulation pressure to a sensor through a pressure transmitting piston of the dynamic pressure generator and transmitting a correspondingly-generated sensor signal to the coordinated control system for comparing and processing to obtain an amplitude-frequency and phase-frequency characteristic curve of the measured pressure sensor under different temperature conditions. According to the dynamic calibration device, different frequencies and pressures can be continuously provided and the aim of dynamically calibrating the frequency characteristics of the pressure sensor under the different temperature conditions is achieved.

Description

technical field [0001] The invention belongs to the technical field of measurement and testing, and relates to a dynamic calibration device for small pressure sensors, which can be used for auxiliary manufacturing and precision calibration of large batches of small pressure sensors. Background technique [0002] Pressure (pressure) is one of the most widely used physical parameters in the fields of science and technology, industrial control, aerospace, biomedical engineering, etc., and a pressure sensor for sensing pressure (pressure) is also the most widely used sensor. Pressure sensors are not only used in basic production fields, but also widely used in high-tech complex systems such as aircraft, satellites, rocket engine control systems and industrial control systems. Taking aircraft as an example, almost every modern aircraft needs to be equipped with thousands of high-precision Pressure Sensor. The dynamic pressure calibration device is the key equipment related to th...

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Problems solved by technology

[0003] There are some mature devices for sensor calibration in China, such as the patent "Pressure Sensor Detection Device (Application No.: 201020539084.3)" which proposes a pressure sensor detection device, which can only be used for motorcycle intake pipe pressure sensor calibration, with a small range ;Patent "a pressure sensor detection device (application number 201120252650.7)" has low calibration accuracy, and it is difficult to achieve dynamic calibration, and the calibration efficiency is low

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