Method and device for non-contact measuring surfaces

A non-contact measurement and equipment technology, applied in measurement devices, geometric properties/aberration measurement, optical devices, etc., can solve problems such as discontinuity

Active Publication Date: 2014-01-29
UNIV POLITECNICA DE CATALUNYA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

A further disadvantage is that these methods are discontinuous

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  • Method and device for non-contact measuring surfaces
  • Method and device for non-contact measuring surfaces
  • Method and device for non-contact measuring surfaces

Examples

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Embodiment Construction

[0099] The drawings illustrate an exemplary embodiment of a non-contact, high-precision, rapid measurement device. figure 1 A non-limiting example of the device shown in is generally indicated by 100 . Optical profilers are capable of measuring any optical surface. While useful in many applications, the present example relates to a measurement device 100 for non-contact measurement of the surface of a lens. The lens is generally indicated at 300 in the drawings herein.

[0100]The measuring device 100 comprises a light projection arrangement 110 comprising one or a series of LEDs 111 . Such a light projection device 110 in the shown device 100 is suitable for projecting a pattern of structured light through an aperture 112 onto a target area of ​​the lens 300 . Such as figure 1 As shown in , the light projection device 110 further includes a collimating optical device 113 , a 45° mirror 114 , an optical lens 115 , a beam splitter 116 and a microscope objective 150 .

[01...

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Abstract

A slit (m) is projected onto an object surface in which reference point (X1) is in a horizontal axis (x) closest to best in focus position (P). One image of a field of view area (F) is acquired after reflection of light comprising said reference point (X1). Position (Z1) of the object (300) in a vertical axis (z) is determined. Images of respective field of view areas (F) are acquired after reflection of light having reference points (X2, X3... Xn) by simultaneously moving the object (300) along axis (z) to maintain reference points (X2, X3... Xn) closest to best in focus position (P). Positions (Z2, Z3... Zn) in which images were acquired are determined. The best in focus position (P) along horizontal axis (x) is determined for each image. A correction differential (?1, ?2...?n) between best in focus position (P) and reference points (X1, X2.. Xn) is calculated.

Description

technical field [0001] A method of non-contact surface metrology is disclosed herein. More specifically, a method for non-contact measurement of a surface as defined in the preamble of claim 1 is provided. [0002] A device for non-contact measuring surfaces as defined in the preamble of claim 12 is also disclosed. Background technique [0003] Optical components with flat and spherical surfaces are relatively easy to manufacture and measure. However, due to their aberration-limited performance, the optical components with flat and spherical surfaces are replaced by optical components with complex surfaces, such as aspheric surfaces and arbitrary-form surfaces. Optical components with complex surfaces can eliminate aberrations and provide many other advantages. Optical components with complex surfaces are obtained using machining, light profiling and metrology techniques. [0004] In recent years, advanced manufacturing techniques for such optical components have been de...

Claims

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Application Information

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IPC IPC(8): G01B11/25G02B21/00
CPCG02B21/0016G01M11/025G02B21/06G01B11/2518G01B9/04G01B11/25G01B11/24
Inventor F·拉古尔塔·伯特兰A·皮恩托·维拉R·阿蒂加斯·珀萨尔斯C·卡德瓦尔·阿蒂古埃斯
Owner UNIV POLITECNICA DE CATALUNYA
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