Diaphragms for electrostatic actuators in inkjet printers
A technology of actuators and printers, applied in printing and other directions, can solve problems such as the fragility of piezoelectric transducers, the difficulty of transducer design and power, and the limitation of the actual density of actuators.
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[0014] Reference will now be made in detail to embodiments of the invention, examples of which are illustrated in the accompanying drawings. Referring generally to the drawings, embodiments of the present invention provide diaphragms and methods of making diaphragms for use in electrostatic actuators. The diaphragm generally includes one or more full thickness sections, which may include static "node" sections and movable "piston" sections, and one or more thickness reducing deflection recesses. The node segment may be bonded to the substrate, the piston segment may be aligned with an electrode of an electrode layer bonded to the substrate, and the flexure recess may be aligned with one or more traces provided by the electrode layer. The traces may be coupled to electrodes configured to exert an electrostatic force on the membrane.
[0015] This combination of full thickness sections and reduced thickness sections in the diaphragm can reduce the amount of electrical current u...
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