Apparatus for fluid control device leak detection
A technology for controlling equipment and fluids, which is applied in the field of leak detection and can solve problems such as bellows leakage
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[0009] Some examples are shown in the figures above and described in detail below. In describing these examples, like or identical reference numbers are used to identify identical or similar elements. The figures are not necessarily to scale and certain features and certain views of the figures may be shown exaggerated in scale or schematically for clarity and / or conciseness. Furthermore, several examples have been described throughout this specification. Any feature from any example may be included with, substituted for, or otherwise combined with other features from other examples.
[0010] Fluid control equipment implemented in hazardous and / or lethal applications such as chlorine and / or polysilicon production may include bellows to prevent leakage of process fluid to atmosphere through the cover. However these bellows may develop leaks over time. Such bellows leaks may be difficult to detect without installing additional air monitoring components and / or exposing operato...
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