Rotary exposure carrying equipment
A rotary and conveying technology, which is applied in the direction of microlithography exposure equipment, photolithography exposure device, etc., can solve the problems of increased process time and complicated exposure steps, and achieve the reduction of process time, simplification of operation steps, and improvement of efficiency. Effect
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[0039] The specific embodiments adopted by the present invention will be further described by the following embodiments and attached drawings.
[0040] refer to figure 1 , which is a schematic diagram showing the rotary exposure carrier device according to the first embodiment of the present invention. The rotary exposure carrying device 100 of the first embodiment of the present invention includes a carrying device 1 and a rotary moving device 2 .
[0041] The carrying device 1 is used for carrying a substrate 4 . In this embodiment, the carrying device 1 includes a fixing member 11 for fixing the substrate 4 . The carrying device 1 is a platform, and the fixing member 11 is a clamp.
[0042] The rotary moving device 2 includes a rotating mechanism 21 , a driving mechanism 22 , and a conveying mechanism 23 . Wherein, the rotating mechanism 21 is connected to the carrying device 1 . In this embodiment, the rotating mechanism 21 is a shaft 21 that rotates axially, and move...
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