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Rotary exposure carrying equipment

A rotary and conveying technology, which is applied in the direction of microlithography exposure equipment, photolithography exposure device, etc., can solve the problems of increased process time and complicated exposure steps, and achieve the reduction of process time, simplification of operation steps, and improvement of efficiency. Effect

Inactive Publication Date: 2014-02-12
APONE TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the exposure steps are complicated, which increases the process time

Method used

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  • Rotary exposure carrying equipment
  • Rotary exposure carrying equipment
  • Rotary exposure carrying equipment

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Embodiment Construction

[0039] The specific embodiments adopted by the present invention will be further described by the following embodiments and attached drawings.

[0040] refer to figure 1 , which is a schematic diagram showing the rotary exposure carrier device according to the first embodiment of the present invention. The rotary exposure carrying device 100 of the first embodiment of the present invention includes a carrying device 1 and a rotary moving device 2 .

[0041] The carrying device 1 is used for carrying a substrate 4 . In this embodiment, the carrying device 1 includes a fixing member 11 for fixing the substrate 4 . The carrying device 1 is a platform, and the fixing member 11 is a clamp.

[0042] The rotary moving device 2 includes a rotating mechanism 21 , a driving mechanism 22 , and a conveying mechanism 23 . Wherein, the rotating mechanism 21 is connected to the carrying device 1 . In this embodiment, the rotating mechanism 21 is a shaft 21 that rotates axially, and move...

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Abstract

The invention provides rotary exposure carrying equipment, which is used for carrying a substrate to carry out exposure; the rotary exposure carrying equipment comprises a bearing device and a rotary shifting device; the bearing device is used for fixing the substrate thereon and carrying the substrate; the rotary shifting device is provided with a rotary mechanism; the rotary mechanism is connected to the bearing device and can move in a rotating state, and therefore, the exposure processing efficiency is improved.

Description

technical field [0001] The present invention relates to an exposure carrying device, in particular to a rotary exposure carrying device. Background technique [0002] Products that require electronic circuit image forming, such as LCDs, printed circuit boards, and wireless chargers, all need to go through steps such as designing circuits, applying photoresist, aligning, exposing, developing, etching, removing photoresist, and testing, etc. The designed electronic circuit image is transferred and printed on a substrate. The exposure process typically uses a light source (eg, a short arc mercury lamp) to illuminate the substrate to expose the substrate. [0003] However, in the prior art, when exposing each surface of the substrate using an exposure device, it is necessary to sequentially turn over the substrate to expose each surface of the substrate sequentially. Therefore, the exposure steps are complicated and the process time is increased. Contents of the invention ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20
Inventor 刘维林
Owner APONE TECH